April 21, 2004 Lehigh Valley, Pa.
Air Products announced today at Semicon Europa, Munich, Germany, that it is introducing Megabit III™ Arsine to the European market.
The introduction of Megabit III™ Arsine, the highest grade of arsine on the market, demonstrates a continued effort to provide solutions that meet the changing demands of the compound semiconductor market. High purity arsine is essential to grow epitaxial films with low background doping concentration via the MOCVD process.
Typical customer requirements are dopant concentrations of 5x1014 /cm³. Air Products' Electronics team has developed Megabit III, with background doping concentration in GaAs of <1014 /cm³.
"Until recently, background doping levels of 1015/cm³ were considered acceptable in most applications. Most currently available high-purity grades of arsine can satisfy this requirement. However, process changes and demand for more sophisticated devices have resulted in the need to lower background doping levels," explains Dr Rajiv Agarwal, lead research engineer, Air Products.
Results for Megabit III grade arsine for Epitaxial GaAs from MOCVD Process
| Film thickness:
| Growth Temperature:
|| 650 °C|
| Cylinder number
|| Hall Mobility(cm²/V.s)
|| Dopant Concentration(/cm³)|
About Air Products:
Air Products (NYSE:APD) serves customers in technology, energy, healthcare and industrial markets worldwide with a unique portfolio of products, services and solutions, providing atmospheric gases, process and specialty gases, performance materials and chemical intermediates. Founded in 1940, Air Products has built leading positions in key growth markets such as semiconductor materials, refinery hydrogen, home healthcare services, natural gas liquefaction, and advanced coatings and adhesives. The company is recognized for its innovative culture, operational excellence and commitment to safety and the environment. With annual revenues of $6.3 billion and operations in over 30 countries, the company's 18,500 employees build lasting relationships with their customers and communities based on understanding, integrity and passion. For more information, visit www.airproducts.com.