Air Products Home

News ReleaseAir Products Launches Purest Arsine Grade

April 21, 2004 Lehigh Valley, Pa.

Air Products announced today at Semicon Europa, Munich, Germany, that it is introducing Megabit III™ Arsine to the European market.

The introduction of Megabit III™ Arsine, the highest grade of arsine on the market, demonstrates a continued effort to provide solutions that meet the changing demands of the compound semiconductor market. High purity arsine is essential to grow epitaxial films with low background doping concentration via the MOCVD process.

Typical customer requirements are dopant concentrations of 5x1014 /cm³. Air Products' Electronics team has developed Megabit III, with background doping concentration in GaAs of <1014 /cm³.

"Until recently, background doping levels of 1015/cm³ were considered acceptable in most applications. Most currently available high-purity grades of arsine can satisfy this requirement. However, process changes and demand for more sophisticated devices have resulted in the need to lower background doping levels," explains Dr Rajiv Agarwal, lead research engineer, Air Products.

Results for Megabit III grade arsine for Epitaxial GaAs from MOCVD Process
Process Conditions:

 Film thickness:  10µ
 Growth Temperature:  650 °C
 V/III:  150


 Cylinder number  Hall Mobility(cm²/V.s)  Dopant Concentration(/cm³)
 SD010760  187,000  2.0x1013
 SD0012546  197,000  1.8x1013
 SD011382  186,000  7.0x1013
 SG9927720B  181,000  5.4x1013
 SD0012381  167,000  3.5x1013

About Air Products:

Air Products (NYSE:APD) serves customers in technology, energy, healthcare and industrial markets worldwide with a unique portfolio of products, services and solutions, providing atmospheric gases, process and specialty gases, performance materials and chemical intermediates. Founded in 1940, Air Products has built leading positions in key growth markets such as semiconductor materials, refinery hydrogen, home healthcare services, natural gas liquefaction, and advanced coatings and adhesives. The company is recognized for its innovative culture, operational excellence and commitment to safety and the environment. With annual revenues of $6.3 billion and operations in over 30 countries, the company's 18,500 employees build lasting relationships with their customers and communities based on understanding, integrity and passion. For more information, visit  

Connect with us on:

An error has occured, please fix the highlighted fields.
To request a quote or for more information about Air Products, please fill out the form below, and an Air Products representative will contact you shortly.
Please use the form below to contact us.

What can we answer for you?

  1. What kind of inquiry?

If you would prefer to contact us by phone, you can call any of our Air Products locations worldwide by visiting Worldwide Locations & Phone Numbers.


This site uses cookies to store information on your computer. Some are essential to make our site work; others help us to better understand our users. By using the site, you consent to the placement of these cookies. Read our Legal Notice to learn more.