June 21, 2006 Lehigh Valley, Pa.
Air Products (NYSE:APD) today introduced a new stripper product designed to be compatible with copper and advanced low-k materials. Air Products’ ACT® EZSTRIP™ 511, a new etch and ash residue remover, is a fast-acting formulation that completely removes residue in a single wafer tool, processing in as little as 60 seconds. The ACT product lines offer solutions in surface preparation technology, a necessary step in the semiconductor manufacturing process flow.
ACT EZSTRIP 511, which is targeting the 65nm and 45nm technology nodes, has been proven to be effective in single wafer tool processing as well as batch processing. It also possesses a low process temperature, from room temperature to 40°C, which provides an extended bath life.
“It is an exciting and critical milestone to introduce a stripper product that is aggressive to the undesired residue and at the same time is compatible to the delicate low-k material,” says Arifin Budihardjo, ACT product manager—New Product Development, Air Products. “On top of this superior characteristic, this proven product is also environmentally friendly.”
ACT EZSTRIP 511 is comprised of mainly biodegradable components that also offer competitive cost of ownership and improved cleaning efficiency.
Air Products (NYSE:APD) serves customers in technology, energy, healthcare and industrial markets worldwide with a unique portfolio of products, services and solutions, providing atmospheric gases, process and specialty gases, performance materials and chemical intermediates. Founded in 1940, Air Products has built leading positions in key growth markets such as semiconductor materials, refinery hydrogen, home healthcare services, natural gas liquefaction, and advanced coatings and adhesives. The company is recognized for its innovative culture, operational excellence and commitment to safety and the environment and is listed in the Dow Jones Sustainability and FTSE4Good Indices. The company has annual revenues of $8.1 billion, operations in over 30 countries, and over 20,000 employees around the globe. For more information, visit www.airproducts.com.
NOTE: This release may contain forward-looking statements. Actual results could vary materially, due to changes in current expectations.