July 11, 2006 Lehigh Valley, Pa.
Air Products (NYSE:APD) today introduced ACT® NE-168, a new etch and ash residue remover engineered to meet the challenging requirements of semiconductor surface cleaning. The ACT product lines offer solutions in surface preparation technology, a necessary step in the semiconductor manufacturing process flow.
The ACT NE-168 formulation is a buffered, fluoride-containing stripper product that demonstrates cleaning efficacy in single-wafer tool processing as well as in batch processing. ACT NE-168 is suitable for both logic and memory applications and is aimed at the 65nm and 45nm technology nodes.
"The improved stripper product from our ACT NE-series has risen to the technology challenge of copper and advanced low-k dielectrics. We have demonstrated that our stripper technology is tunable to meet customers' stringent requirements," said Arifin Budihardjo, ACT product manager-new product development, Air Products. "The versatile platform of the NE-series can be built upon to enhance the formulation's cleaning efficacy as the technology moves to the next generation."
ACT NE-168 is effective at low process temperatures, ranging from room temperature to 40° Celsius, which helps provide an extended bath life.
Air Products (NYSE:APD) serves customers in technology, energy, healthcare and industrial markets worldwide with a unique portfolio of products, services and solutions, providing atmospheric gases, process and specialty gases, performance materials and chemical intermediates. Founded in 1940, Air Products has built leading positions in key growth markets such as semiconductor materials, refinery hydrogen, home healthcare services, natural gas liquefaction, and advanced coatings and adhesives. The company is recognized for its innovative culture, operational excellence and commitment to safety and the environment and is listed in the Dow Jones Sustainability and FTSE4Good Indices. The company has annual revenues of $8.1 billion, operations in over 30 countries, and over 20,000 employees around the globe. For more information, visit www.airproducts.com.
NOTE: This release may contain forward-looking statements. Actual results could vary materially, due to changes in current expectations.