Air Products Home

News ReleaseAir Products to Build New NF3 Production Facility in Asia

October 04, 2006 Lehigh Valley, Pa.

Air Products (NYSE: APD) today announced it will construct a nitrogen trifluoride (NF3) plant in Ulsan, Korea to support the fast growing Asian semiconductor and liquid crystal display (LCD) markets. The new production facility will be operated by Air Products Korea Electronics and will be constructed at the company’s existing specialty gas site in Ulsan. The first phase of the new plant will produce in excess of 500 metric tons per year and will be completed in late 2007. Upon completion, Air Products’ global NF3 capacity will be more than 2,500 metric tons per year.

This will be the company’s second Electronic Specialty Material (ESM) investment at Ulsan after recently bringing on-stream an ultra-high purity ammonia plant in 2005. This facility complements other Korean ESM facilities in Shiwha, Banwol, Cheonan and Pyeongtaek.

NF3 is used as a chamber cleaning gas in the manufacture of semiconductors, flat panel displays and other electronic devices. When compared with competing products, NF3 offers customers significant reductions in emissions, throughput increases of up to 30 percent, longer chamber life and faster clean rates. NF3 is also stable and non-flammable, making it a safe gas to transport, store and deliver to customers around the world.

“This new manufacturing facility is part of a multi-year investment strategy to build on our leading specialty materials position and enhance our ability to serve our semiconductor and TFT-LCD customers anywhere in the world,” said Mike Hilton, vice president and general manager, Electronics and Performance Materials at Air Products.

In addition, Air Products bulk supply capabilities for NF3 will be further enhanced for the delivery of product to large volume flat panel and 300mm silicon semiconductor fabrication plants. Air Products is the largest and most experienced supplier of Bulk Specialty Gas Systems (BSGS) and ISO modules, which serve to safely and efficiently transport NF3 to locations throughout the world. The company currently has over 300 electronics BSGS and 300 total ISO modules in service. Air Products’ latest BSGS innovation features pipelines that supply NF3 directly to multiple semiconductor and flat panel display fabs from a single location, allowing for further savings while improving safety, quality and reliability.

Air Products has safely manufactured and distributed NF3 for over a quarter century from its ESM manufacturing facility in Hometown, Pa. The company will continue to operate its three existing NF3 plants at that location ensuring reliable global NF3 supply through the operation of multiple independent plants that continue to be optimized. Air Products has built a solid global infrastructure to facilitate the movement of NF3 and other specialty products through strategically placed transfills in Taiwan, Korea, Japan and Belgium and distribution centers near customer locations.

Air Products (NYSE:APD) serves customers in technology, energy, healthcare and industrial markets worldwide with a unique portfolio of products, services and solutions, providing atmospheric gases, process and specialty gases, performance materials and chemical intermediates. Founded in 1940, Air Products has built leading positions in key growth markets such as semiconductor materials, refinery hydrogen, home healthcare services, natural gas liquefaction, and advanced coatings and adhesives. The company is recognized for its innovative culture, operational excellence and commitment to safety and the environment and is listed in the Dow Jones Sustainability and FTSE4Good Indices. The company has annual revenues of $8.1 billion, operations in over 30 countries,and over 20,000 employees around the globe. For more information, visit

NOTE: This release may contain forward-looking statements. Actual results could vary materially, due to changes in current expectations.

Connect with us on:


Contact Information

  • Asia
    Jessica Cheng
  • Press Contact
    Renee Giello
    (610) 481-4876
    Air Products and Chemicals, Inc.
    7201 Hamilton Boulevard
    Allentown, PA 18195-1501
  • Investor Contact
    Simon Moore
    (610) 481-7461
    Air Products and Chemicals, Inc.
    7201 Hamilton Boulevard
    Allentown, PA 18195-1501
    (610) 481-2729
An error has occured, please fix the highlighted fields.
To request a quote or for more information about Air Products, please fill out the form below, and an Air Products representative will contact you shortly.
Please use the form below to contact us.

What can we answer for you?

  1. What kind of inquiry?

If you would prefer to contact us by phone, you can call any of our Air Products locations worldwide by visiting Worldwide Locations & Phone Numbers.


This site uses cookies to store information on your computer. Some are essential to make our site work; others help us to better understand our users. By using the site, you consent to the placement of these cookies. Read our Legal Notice to learn more.