Air Products Home

News ReleaseDuPont Air Products NanoMaterials LLC Receives Favorable Ruling in Non-Infringement Case Against Cabot Microelectronics

July 12, 2010 Tempe, Ariz.

A jury in the patent infringement litigation in the United States District Court for the District of Arizona rendered a verdict last week that alumina-based and silica-based tungsten Chemical Mechanical Planarization (CMP) slurries produced and sold by DuPont Air Products NanoMaterials, LLC (DA NanoMaterials) do not infringe Cabot Microelectronics’ patents.

“We are extremely pleased with the jury’s conclusion that DA NanoMaterials’ tungsten CMP slurries do not infringe Cabot’s patents,” said Seng Wui Lim, chief executive officer, DA NanoMaterials. “The ruling reinforces the fact that our products are vastly different from Cabot’s and enables us to continue to aggressively pursue future business growth regarding these products. We remain committed to delivering innovative products, and will continue to compete in the marketplace worldwide while providing our customers with superior technology and service.”

In addition to this court ruling, on June 18, the appellate Korean Patent Court found Cabot's tungsten CMP Korean patent invalid. This continues a series of losses by Cabot in Korean court cases finding Cabot's tungsten CMP patent invalid, including invalidations in the Seoul District Court, the appellate Korean High Court and the Korean Intellectual Property Tribunal.

About DA NanoMaterials L.L.C.

Established in 2000, DA NanoMaterials L.L.C. is a 50:50 joint venture between DuPont and Air Products. Headquartered in Tempe, Ariz., with regional headquarters in Hsinchu County Taiwan, the company operates state-of-the-art applications and formulation laboratories in Tempe, Ariz., and Taiwan. It manufactures products in Asia, Europe and North America to service the global semiconductor and wafer polishing markets. DA NanoMaterials markets its CMP slurries under the CoppeReady®, MicroPlanar®, Syton® and Mazin™ trademarks. Additional information on the company can be obtained from its website at www.nanoslurry.com.  

About Air Products

Air Products (NYSE:APD) serves customers in industrial, energy, technology and healthcare markets worldwide with a unique portfolio of atmospheric gases, process and specialty gases, performance materials, and equipment and services. Founded in 1940, Air Products has built leading positions in key growth markets such as semiconductor materials, refinery hydrogen, home healthcare services, natural gas liquefaction, and advanced coatings and adhesives. The company is recognized for its innovative culture, operational excellence and commitment to safety and the environment. In fiscal 2009, Air Products had revenues of $8.3 billion, operations in over 40 countries, and 18,900 employees around the globe. For more information, visit www.airproducts.com.  

About DuPont

DuPont is a science-based products and services company. Founded in 1802, DuPont puts science to work by creating sustainable solutions essential to a better, safer, healthier life for people everywhere. Operating in more than 90 countries, DuPont offers a wide range of innovative products and services for markets including agriculture and food; building and construction; communications; and transportation. For more information, visit www.dupont.com.  

CoppeReady®, MicroPlanar®, Syton® and Mazin™ are trademarks or registered trademarks of DA NanoMaterials.

Media Contacts:
(DuPont)
Dan Turner
Tel.: 302-774-0081

Connect with us on:

|

Contact Information

  • Press Contact
    Renee Giello
    (610) 481-4876
    Air Products and Chemicals, Inc.
    7201 Hamilton Boulevard
    Allentown, PA 18195-1501
    USA
An error has occured, please fix the highlighted fields.
To request a quote or for more information about Air Products, please fill out the form below, and an Air Products representative will contact you shortly.
Please use the form below to contact us.

What can we answer for you?

  1. What kind of inquiry?

If you would prefer to contact us by phone, you can call any of our Air Products locations worldwide by visiting Worldwide Locations & Phone Numbers.

X

This site uses cookies to store information on your computer. Some are essential to make our site work; others help us to better understand our users. By using the site, you consent to the placement of these cookies. Read our Legal Notice to learn more.

Close