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News ReleaseAir Products Introduces Xenon Difluoride for Etching Applications

High Performing, Highly Selective Etch Material to Initially Target MEMS Market

July 27, 2010 Lehigh Valley, Pa.

Air Products (NYSE:APD) today announced the addition of xenon difluoride (XeF2) to its portfolio of electronic materials. XeF2 is used as an etching gas, primarily in the Micro Electro Mechanical Systems (MEMS) market. XeF2 provides manufacturers with a high selectivity to silicon versus SiO2 and other materials.

Air Products is uniquely positioned to serve the burgeoning XeF2 market thanks to its more than 35-year history of fluorine expertise and its access to affordable xenon on account of its large-scale air separation units and XeCovery™ xenon recovery system.

“Our XeCovery and XeF2 offerings are complementary and together offer customers a stable low-cost supply of XeF2,” said Tim Maykut, commercial development manager for Air Products. “Our experience in chemical synthesis has shown that the continuous, flow-through process we developed can deliver quality material at the high volumes needed to match the growth potential of the MEMS market.Additionally, our deep understanding of etching process applications and supply of other etch materials provides further value to any XeF2 user. Also, our packaging and delivery expertise support an easy integration of this material to customers’ equipment.”

Air Products has already built a pilot plant capable producing up to 300 kilograms per year, and this production technology can quickly be scaled to metric ton capacities.

To hear more about the xenon difluoride market and its use in the MEMS industry and elsewhere, listen to xenon difluoride podcast.

For more information on this new product, please click here.  

Air Products (NYSE:APD) serves customers in industrial, energy, technology and healthcare markets worldwide with a unique portfolio of atmospheric gases, process and specialty gases, performance materials, and equipment and services. Founded in 1940, Air Products has built leading positions in key growth markets such as semiconductor materials, refinery hydrogen, home healthcare services, natural gas liquefaction, and advanced coatings and adhesives. The company is recognized for its innovative culture, operational excellence and commitment to safety and the environment. In fiscal 2009, Air Products had revenues of $8.3 billion, operations in over 40 countries, and 18,900 employees around the globe. For more information, visit

NOTE: This release may contain forward-looking statements. Actual results could vary materially, due to changes in current expectations.

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    Renee Giello
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    Air Products and Chemicals, Inc.
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    Air Products and Chemicals, Inc.
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