Copper Barrier Slurries Offer Device Makers Erosion Improvement and Reduced Defects
September 23, 2015 Lehigh Valley, Pa.
Air Products (NYSE:APD) will feature its advanced copper barrier slurries for the electronics industry at the International Conference on Planarization Technology (ICPT), being held at the Wild Pass Horse Hotel & Casino in Chandler, Ariz., from September 30-October 2.
As part of the conference’s Technical Sessions, Air Products will present a paper titled “Attributes of an Advanced Node Copper Barrier Slurry” on Wednesday, September 30, at 9:35 a.m. in the Ironwood Room. The work highlights a new barrier slurry formulation that significantly boosts overall removal rates through the use of chemical additives combined with an optimized abrasive, resulting in increased removal rates and reduced defects compared to current commercial offerings.
“As a result of this research, post barrier CMP planarity, specifically density array erosion, is improved by varying the specific barrier slurry removal rate ratios in a controllable fashion,” said Jim Schlueter, Air Products’ advanced barrier technology manager, who is presenting the technical paper. “Compared to existing products, the new barrier slurries offer major improvements in demonstrating significant array erosion improvement and provide device makers tunability and enhanced planarity, along with reduced defects,” added Schlueter.
In addition to the technical paper, Air Products will also participate in the following poster sessions at ICPT.
- “Improved Performance of Air Product STI2100TM Calcined Ceria Slurry for Advanced Node Applications”
- “Low Dishing Cu CMP Slurries for Advances Node Applications”
- “Advanced High Rate, Neutral pH Tungsten Slurries”
- “Post-STI CMP Buff Cleaning to Reduce Defectivity”
ICPT conference attendees are invited to meet with an Air Products scientist or representative in Chandler to discuss their specific challenges with CMP or post CMP cleans. To schedule a meeting during the conference, please click here.
Air Products is a leading supplier of specialty gases and chemicals, bulk gases, and delivery equipment and services to the global electronics industry. For information about Air Products’ complete portfolio of gases, equipment and technology solutions for the electronics industry, call 1-800-654-4567 (outside the U.S. 610-706-4730), or visit www.airproducts.com/electronics.
About Air Products
Air Products (NYSE:APD) is a leading industrial gases company. For nearly 75 years, the company has provided atmospheric, process and specialty gases, and related equipment to manufacturing markets including metals, food and beverage, refining and petrochemical, and natural gas liquefaction. Air Products’ materials technologies segment serves the semiconductor, polyurethanes, cleaning and coatings, and adhesives industries. Over 20,000 employees in 50 countries are working to make Air Products the world’s safest and best performing industrial gases company, providing sustainable offerings and excellent service to all customers. In fiscal 2014, Air Products had sales of $10.4 billion and was ranked number 276 on the Fortune 500 annual list of public companies. For more information, visit www.airproducts.com.