September 08, 2016 Lehigh Valley, Pa.
Dr. Bob Ridgeway, group leader for PECVD and FCVD Applications at Versum Materials, will deliver a presentation at the IC Forum of SEMICON Taiwan on September 9, 2016, entitled, “Development of a Porous low-k Precursor to Provide Enhanced Mechanical Properties without Sacrificing Carbon Content.”
Scheduled for 3:10 p.m., in Room 401 of Hall 1, Ridgeway’s presentation will be based on a recent detailed investigation which he co-authored with Versum colleagues William R. Entley, Jennifer L. Achtyl, Raymond N. Vrtis and Jianheng Li. His talk will focus on a novel silicon-containing precursor that balances the higher mechanical strength associated with low-carbon films with the improved resistance to plasma induced damage (PID) typically associated with high-carbon films. By leveraging our long-standing expertise, a unique offering has been developed that continues to strengthen our marketing leading position in the low-k space. Through plasma enhanced chemical vapor deposition and UV curing, the deposited films have improved mechanical properties by incorporation of carbon bridging in the porous low-k network with reduced PID compared to films deposited only for mechanical strength enhancement.
The presentation will also provide empirical modeling results allowing the selection of operating conditions using the novel precursor to achieve specific films property targets related to dielectric constant, elastic modulus, hardness and PID. All work described in the paper was performed on an industry-relevant platform using 300mm wafers.
The presentation will be part of Versum’s presence at SEMICON Taiwan show, where the company will publicly introduce its new identity ahead of the spin-off of Versum Materials from Air Products planned for October 2016. Versum will showcase, in Booth #138 - 4th Floor, the innovative products and services that make the company one of the semiconductor industry’s largest and most respected suppliers.
Information on the products and services displayed at the show will be available at www.airproducts.com/semicon.
About Air Products
Air Products (NYSE: APD) is a world-leading Industrial Gases company celebrating 75 years of operation. The company's core Industrial Gases business provides atmospheric and process gases and related equipment to manufacturing markets, including refining and petrochemical, metals, electronics, and food and beverage. Air Products is also the world's leading supplier of liquefied natural gas process technology and equipment. The company's Materials Technologies business serves the semiconductor, polyurethanes, cleaning and coatings, and adhesives industries.
The company had fiscal 2015 sales of $9.9 billion and has a current market capitalization of more than $30 billion. Approximately 19,000 employees in 50 countries strive to make Air Products the world's safest and best performing Industrial Gases company, providing sustainable offerings and excellent service to all customers. For more information, visit www.airproducts.com.
About Versum Materials
Versum Materials, Inc. (versummaterials.com) is a best-in-class electronic materials company providing high-purity chemicals and gases, delivery systems, services and materials expertise to meet the evolving needs of the global semiconductor, display and LED markets. Derived from the Latin word for “toward,” the name “Versum” communicates the company’s deep commitment to helping customers move toward the future by collaborating, innovating and creating cutting-edge solutions. A global leader in technology, quality, safety and reliability, Versum is one of the world’s largest suppliers of next generation CMP slurries, ultra-thin dielectric and metal film precursors, formulated cleans and etching products, and delivery equipment that has revolutionized the semiconductor industry.
Versum Materials is expected to spin off from Air Products in October 2016, and will have annual sales of about US$1 billion. With more than 1,900 employees operating in over 10 production facilities and six R&D and technical centers, Versum Materials has the scale and breadth to support customers globally.
NOTE: This news release contains "forward-looking statements" within the safe harbor provisions of the Private Securities Litigation Reform Act of 1995 including statements about the Company's plans for completion of the spin-off, the expected benefits of the spin-off, the tax free nature of the spin-off, the prospects for the independent companies following the spin-off and the timing of the transaction. These forward-looking statements are based on management's reasonable expectations and assumptions as of the date of this release. Actual results may differ materially from the expectations expressed in the forward-looking statements because of many factors not anticipated by management, including, without limitation, our ability to obtain regulatory approvals, Air Products' decision not to consummate the spin-off due to market, economic or other events; our ability to fully realize the anticipated benefits of the spin-off; negative effects of the announcement or the consummation of the proposed spin-off on the market price of the company's common stock; significant transaction costs and or unknown liabilities; general economic and business conditions that affect the companies in connection with the proposed spin-off; changes in capital market conditions; future opportunities that the Company's board may determine present greater potential to increase shareholder value, the ability of our companies to operate independently following the spin-off; and other risk factors described in the Company's Form 10-K for its fiscal year ended September 30, 2015. The Company disclaims any obligation or undertaking to disseminate any updates or revisions to any forward-looking statements contained in this document to reflect any change in assumptions, beliefs or expectations or any change in events, conditions, or circumstances upon which any such forward-looking statements are based.
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