Currently modern filters are able to remove particulate contaminants in process gases with high efficiency. However, filters are unable to verify and quantify the cleanliness of the gas. In order for a technique for detecting microscopic particles to be accurate it must have the capability of detecting particles as small as 0.02 µm and be able to process reactive or toxic microchip processing gases. The technique should perform the particle measurement at a pressure equal to the process gas system line pressure (typically 60 psig). By performing the measurement at the gas line pressure, the sample gas would not need to be reduced in pressure before entering the instrument. Air Product’s Specialty Gas CNC can provide numerous process benefits which can reduce yield, and potentially increase profits.
- Ability to count smaller particles (less than 0.02 µm)
- Use a variety of toxic or reactive specialty gases
- Guarantee gas quality
- Perform particle measurement at pressure equal to process pressure line
Priority Patent Docket No.
|Apparatus and Method for Detecting Particles in Reactive and Toxic Gases
||US 6,469,780 |
Specialty Gas CNC
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