Air Products Home

Self Evacuating Micro Environment


Air Products is offering for license patented technology for a mobile, self-evacuating, micro-environment system and method for transporting and storing of substrates between processing chambers within the semiconductor manufacturing industry. Current transporting and storing devices had issues with processing steps because they are typically conducted at reduced pressures. This consumes significant quantities of energy and increases substrate processing costs. These additional steps may also reduce the productivity of the tool causing an increase in the costs associated with the use of the tool.


  • Energetically favorable
  • Decreases processing cost
  • Increases productivity of processing tools
  • Limits contamination due to atmosphere, out gassed molecules, and condensation from evacuation
  • Increases device yield


Priority Patent Docket No.

Self Evacuating Micro Environment System US 6,637,998

Self Evacuating Micro Environment
Download PDF (93 KB)

Back to Technology Licensing-Electronics

An error has occured, please fix the highlighted fields.
To request a quote or for more information about Air Products, please fill out the form below, and an Air Products representative will contact you shortly.
Please use the form below to contact us.

What can we answer for you?

  1. What kind of inquiry?

If you would prefer to contact us by phone, you can call any of our Air Products locations worldwide by visiting Worldwide Locations & Phone Numbers.


This site uses cookies to store information on your computer. Some are essential to make our site work; others help us to better understand our users. By using the site, you consent to the placement of these cookies. Read our Legal Notice to learn more.