Air Products is offering for license patented technology for a mobile, self-evacuating, micro-environment system and method for transporting and storing of substrates between processing chambers within the semiconductor manufacturing industry. Current transporting and storing devices had issues with processing steps because they are typically conducted at reduced pressures. This consumes significant quantities of energy and increases substrate processing costs. These additional steps may also reduce the productivity of the tool causing an increase in the costs associated with the use of the tool.
- Energetically favorable
- Decreases processing cost
- Increases productivity of processing tools
- Limits contamination due to atmosphere, out gassed molecules, and condensation from evacuation
- Increases device yield
Priority Patent Docket No.
|Self Evacuating Micro Environment System
Self Evacuating Micro Environment
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