An improved ultrafine aerosol condensation nucleus counter (UFACNC) has been developed, which detects 30 Angstrom particles with up to 100% efficiency. The counter samples aerosol at a flow rate of 150 cm3 per minute. The new UFACNC has also been found to produce a low background noise count rate. In addition, the new UFACNC has been used to demonstrate a new technique for size classifying ultrafine contaminant particles using only a UFACNC. These features result in an improved accuracy in determining the concentration of ultrafine particles in ultraclean gas systems. The new particle counter therefore provides information on ultrafine contamination levels to a degree of accuracy which has been previously unattainable. Knowledge of where the contamination comes from within the electronics fabrication area will permit an improved control of critical process variables during sub-micrometer device fabrication leading to potentially higher production yields.
- Low background noise count rate
- Improved accuracy in determining the concentration of ultrafine particles
- Identify ultrafine contamination sources
- Improved control of critical process variables during sub-micrometer device fabrication
Priority Patent Docket No.
|Process for Sizing Particles using Condensation Nucleus Counting
Ultrafine Aerosol Condensation Nucleus Counter - (UFACNC)
Download PDF (129 KB)
Back to Technology Licensing-Electronics