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Semiconductor Equipment Services

 

Semiconductor Equipment Services Offerings

Maximize the life of your assets

At Air Products, we know semiconductor fabs inside and out, as we’ve been a leading supplier to the industry for more than 25 years. Through that experience, we understand the challenges facing fabs today and know that many of those challenges are in the details.

Drawing on our expertise and extensive technical capabilities, Air Products is enhancing our portfolio of products to include a broad range of services for semiconductor fabs. These services will enable you to focus on what you do best and lower your cost of ownership through increased tool uptime and decreased maintenance costs.

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Air Products' Chandler Clean Room Facility

World-Class Refurbisher of Fab Equipment

Multi-platform capability:
Air Products technicians have cumulative experience on ~150 different makes and models of fab equipment
Service support: decontamination, deinstallation, upgrades, downgrades, size changes, retrofits, special engineering projects, installations, start-up, qualification, training, and service contracts
Local field service provided in China, Japan, Singapore, South Korea and Taiwan as well as throughout Europe and North America


OEM authorized to support legacy equipment:
LAM     Varian
Ownership of and access to IP
Responsible for >1100 tools worldwide, including parts and field service
Parts kit, repair and exchange programs
Uptime performance programs
Parts banks in China, Japan, Netherlands, Scotland, Singapore, South Korea, Taiwan and United States


Facility designed as a Class 10 clean room with sub-fab facilities:
Refurbished ~200 major systems to date
Remarketing alliance with Babcock and Brown Electronics Management  
To access our inventory of spare parts please visit www.keyassets.com and click on the Air Products logo keyassets.com
Responsible Care® member  


Service benefits that really add up

  • ISO 9001-2000 registered since 2002
  • Global support with local service in local language
  • 24/7 support available
  • Reliable and guaranteed service levels
  • Cost-effective outsourcing
  • Focused on your needs
  • Customized service packages
  • Technical Know How
  • The right service when you need it
  • Proven leaders in Safety
  • Over 25 years experience in the industry
Comprehensive Chiller and Heat Exchanger Service Program
  • State-of-the-art testing facilities in Europe and North America
  • All repaired and refurbished systems tested in a simulated fab environment
  • Automated recipe control that supports uniform testing methods
  • PCW loop and universal electrical utilities
  • Capable of servicing a broad spectrum of manufacturers and models
  • EPA certified technicians
  • 6 month warranty on all repaired equipment (i.e. parts repaired or replaced)
  • 1 year warranty on all refurbished equipment
Contact Information

To obtain additional more comprehensive information, please contact your local Semiconductor Equipment Services Group office.

Corporate Headquarters
Air Products and Chemicals, Inc.
7201 Hamilton Boulevard
Allentown, PA 18195-1501
Tel 800-654-4567
Tel 610-706-4730
Fax 800-272-4449
Fax 610-706-6890

The Netherlands
Air Products Nederland B.V.
Technical and Training Center
Oostkanaaldijk 110
6534AL Nijmegen
The Netherlands
Tel +31 (0)24 3523 640
Fax +31 (0)24 3523 659
E-mail eesparts@airproducts.com

Southwest
Air Products and Chemicals, Inc.
300 N. 56th Street
Chandler, AZ 85226
Tel 800-837-2724
Tel 480-893-4500
Fax 480-893-4599
E-mail maxlife@airproducts.com

Asia Japan
Air Products Japan, Inc.
21F Muza Kawasaki Central Tower
1310, Omiya-cho, Saiwai-ku
Kawasaki City
Kanagawa 212-8554 Japan
Tel 81 44 542 1594
Fax 81 44 542 1595
Email maxlifej@airproducts.com