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Electronic Equipment Solutions (EES) Gas and Chemical Delivery Systems
Providing cost-competitive solutions to our broad semiconductor customer base 
The Air Products Electronic Equipment Solutions (EES) business unit is backed by more than 60 years of experience in the safe and reliable delivery of gases and chemicals to the semiconductor, TFT-LCD and photovoltaics industries. Our GASGUARD® and ChemGuard® Delivery Systems are the industry benchmark for cost-effective fabwide gas and chemical supply. Our cost-competitive solutions will help your process run more efficiently and effectively.
Our EES Comprehensive Product Offering includes:
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ChemGuard Chemical Delivery Systems
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GASGUARD Gas Delivery Systems - gas cabinets and gas panels
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GASGUARD Bulk Specialty Gas Systems (BSGS) – High-Flow System and Very High Flow System
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GASGUARD Distribution Systems - Valve Manifold Boxes (VMB) and Distribution Valve Box (DVB)
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GASGUARD Direct Blender (onsite dynamic gas blender)
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VaporGuard® Temperature Control Systems
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QMAC® Quality Monitoring and Control Anaytical Systems
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Remote command and monitoring life-safety systems available
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Multiple controller platform options
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Contract manufacturing
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Service offerings – Turnkey solutions, project & construction management, startup-commissioning
Why should you consider Air Products for your semiconductor equipment needs? The facts speak for themselves……
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>20,000 cabinets and VMBs in use at more than 150 worldwide customer locations
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>400 bulk specialty gas systems (BSGS) in worldwide operation
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>2000 ChemGuard chemical delivery systems supplied worldwide
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Demonstrated equipment uptime of 99.9%
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The largest manufacturing capacity in the industry
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Our system designs are tailored to the molecule properties (process flows, purity, hazards)
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Our world-class R&D facilities and the extensive knowledge-base of our chemists ensure the best delivery system technologies, safety and creative technical solutions
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All components undergo rigorous, accelerated lifecycle testing to improve system reliability (HALT)
Where you are, when you need it:
Our extensive global manufacturing capabilities include production in North America (Allentown, Pennsylvania) and Ansan, South Korea. Through these two manufacturing operation centers, we can supply your equipment to you where you are, when you need it.
Safety is our #1 Priority
At Air Products, nothing is more important than safety—not sales, not production, not profits. It’s a shared commitment with our customers and partnerships. We have earned numerous safety-related awards and are among the top performers of the CMA's Responsible Care® program.
Tell Me More……
Click on the equipment images above to learn more about each offering’s features and benefits, download a datasheet or product manual, or listen to available product podcasts.
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