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 GASGUARD® Very High Flow System (VHF)
Since their introduction in the late 1990s, Air Products' GASGUARD® Bulk Gas Delivery Supply (BSGS) systems have revolutionized the global electronics industry in many ways. There are now hundreds of installations worldwide, dedicated to the safe and reliable supply of an array of electronic specialty gases.
Today, Air Products' BSGS systems are the benchmark for the safe and continuous delivery of large volumes of electronic specialty gases and materials. Air Products listens to its customers and delivers solutions that match their needs.
The new VHF is our fourth generation BSGS and delivers all of the advantages of the first three systems:
- Combines Air Products' Universal Pigtail functions with original BSGS in one box for a smaller footprint and lower cost of ownership.
- Close to the source for easy operation during source change.
- Flexible and easy to install systems can all deliver SiH4, NF3, NH3, N2O, HCl.
Key Benefits of the Very High Flow System:
Reduced Cost of Ownership
- Less handling and connections reduces potential exposure to hazardous gases and chemicals.
- Reduces fab downtime.
- VHF is available in multiple layers of redundancy for best possible fab uptime.
Improved Safety & Operations
- Less handling and connections reduces potential exposure to hazardous gases and chemicals.
- Reduces fab downtime.
- VHF is available in multiple layers of redundancy for best possible fab uptime.
Safety:
At Air Products, nothing is more important than safety—not sales, not production, not profits. It is a shared commitment with our customers and through our partnerships. We have earned more safety-related awards than any other industrial gas company and are among the top performers of the CMA's Responsible Care program.
The GASGUARD® Very High Flow System (VHF)The next generation of BSGS solutions (PDF, 360 K) > download brochure |
For more information on our GASGUARD VHF, please contact:
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