Feedback Search Site Map
Air Products Products Customer Support Technology About Us Investor Info Corporate Responsibility Career Opportunities Press Room APDirect
Welcome 
 
Technologies 
Global Contacts 
E-Learning Center 
MSDS 
Safety Services 
Product Finder 
 
Site home 
Air Products Home 
 
Semiconductor
 

An extensive specialty materials portfolio

We offer customers an extensive specialty materials portfolio, which differentiates us from the competition and includes products used in each step of device manufacturing including, doping, deposition, lithography, stripping, etching, CMP, post-CMP cleans, and cleaning.

Our portfolio includes a range of established and familiar materials:

  • Schumacher® specialty chemicals (e.g. TEOS, TRANS-LC®, t-DCE, BTBAS, etc.)
  • ACT® specialty chemicals (e.g. EZSTRIP® Series, NE/XT Series, etc.)
  • Electronic specialty gases (e.g. NF3, C2F6, C4F6, SF6, WF6, N2O, SiH4, etc.)
  • Solkatronic® specialty gases (e.g. phosphine, arsine, etc.)
audio
ComPATSM Materials Compatibility Assurance Program
Dr. Laura Matz and John Caligiuri describe the ComPAT materials compatibility program for semiconductor manufacturers. (6:13)
August 2008
> play
> download

  select your region to enter the product catalog:
    United States/Canada     Europe/Africa/Middle East     Asia/Australia     Latin America/Mexico