|
Applied Materials Ultima NF3 Remote Clean – PFC and HAP Emissions Analysis
Air Products and Applied Materials collaborative work
This paper describes an emissions reduction program for three Ultima HDP-CVD processes: PSG, USG and FSG. The NF3 Remote Clean was shown to effectively eliminate PFC emissions for all three processes with an NF3 utilization rate of >99%. A Delatech CDO was found to remove 99.8% of the fluorine influent resulting from the chamber clean as well.
| 
|
