Air Products has conducted extensive research and determined that HCl, even when used only for chamber cleaning, may be a source of moisture (H₂O) that can contaminate the reactor and lead to oxygen atom-related defects.

HCl used in the epitaxial process can  generate dislocations and other defects. Air Products has therefore introduced MegaBIP® HCl with purity levels of 99.9995%, provided in a unique cylinder with a proprietary internal purifier that reduces moisture levels to less than 0.20 ppm.

As shown in the graph below, extensive testing has shown that MegaBIP HCl can significantly reduce moisture-level defects in the SiGe growth process. Additionally, MegaBIP HCl's unique cylinder allows the high purity level to remain the same from the beginning until it is run essentially liquid-empty, enabling the user to experience higher delivered capacity. This contrasts with conventional cylinders where purity levels can fluctuate widely.