Developed as a replacement for silane and other pyrophoric silicon sources, tetramethylcyclotetrasiloxane is a silicon source for the chemical vapor deposition of high-quality, low dielectric constant films. A volatile liquid precursor, tetramethylcyclotetrasiloxane produces state-of-the-art low dielectric constant films with excellent electrical and mechanical properties. Despite these favorable attributes, tetramethylcyclotetrasiloxane can polymerize when exposed to certain chemicals or when subjected to demanding thermal conditions.
To overcome these concerns, Air Products has developed stabilized ZTOMCATS™, a proprietary, high-purity source material that is far less prone to polymerization than the unstabilized material. This novel, more robust chemical is process transparent and produces films with the desired basic film properties, enabling users to have a more reliable process for producing high-quality low-k thin films.
In order to offer products of unsurpassed purity and quality, as well as security of supply, Air Products has teamed up with DOW CORNING® to supply ZTOMCATS and other low-k precursor source materials such as trimethlysilane (Z3MS™), tetramethylsilane (Z4MS™) and dimethyldimethoxysilane (Z2DM™).
"DOW CORNING", "Z3MS" and "Z2DM" are registered trademarks of Dow Corning Corporation, Midland, Mich. USA.
"Z4MS" and "ZTOMCATS" are trademarks of Dow Corning Corporation, Midland, Mich. USA, subject to license from Air Products and Chemicals, Inc.
|
|
