Air Products' gas and chemical equipment delivers safe, reliable, cost-effective, and high-quality performance at customers' sites around the world.
- GASGUARD® Gas Cabinets and Valve Manifold Boxes have provided safe and reliable gas storage and delivery for over 15 years
- Over 6,000 systems installed at customer sites worldwide
- GASGUARD Bulk Specialty Gas Systems (BSGS) providing a safe, reliable supply of specialty gas for large-volume customers
- QMAC® Analytical Systems provide state-of-the-art analytical and monitoring capabilities for gas distribution systems
- Our full line of chemical delivery equipment supports the effective use of our specialty chemicals, and includes temperature controllers, vapor delivery systems, and bulk supply systems. All equipment is designed with chemical properties in mind, optimizing performance while maintaining chemical purity.
- Our chemical containers are as important as the chemicals we put in them. All containers are carefully designed to protect chemical purity, and are prepped and filled in a cleanroom environment. A complete range of containers is available, with stainless steel containers ranging from 200cc to 200 liters and quartz containers ranging from 500cc to 20 liter.
Bulk Chemical Refill Systems
The Schumacher CHEMGUARDTM – BCD (Bulk Chemical Delivery) is a high-purity 220 liter capacity chemical delivery system. The BCD features 316L stainless steel piping and large flow capacity suitable for the requirements of high-purity, high-volume fabwide chemical supply.
The Schumacher CHEMGUARD Automated Chemical Delivery System is a dual reservoir cabinet designed to meet the demanding needs of current and future fabs.
The Schumacher CHEMGUARD 500 Chemical Delivery System incorporates an automatic solvent purge for use with low volatility chemicals such as TDMAT, TBTDET, and CupraSelect. The CHEMGUARD 500 Chemical Delivery System takes advantage of proven technology from the widely installed CHEMGUARD 500 Chemical Delivery System.
Temperature Control Systems
The Schumacher Absolute™ Temperature Control System provides accurate and stable temperature control of liquid source chemicals. Five different models provide temperature control through the range of 10°–90° C, with an accuracy of ± 0.2o C
Support Systems
The Schumacher LSU is a stand-alone electronics unit designed to indicate an alarm if the chemical level in a stainless steel container falls below the level sensor.
The Schumacher DLSU is a stand-alone electronics unit designed to indicate an alarm if the chemical level in a stainless steel container falls below the low or empty level sensors. |
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