Air Products is an OEM provider
Air Products, through our Legacy Tool Services, is now an authorized OEM provider for; parts supply, engineering and technical support, and repair service. Contact us for current availability and prices.
MEGASYSTMTotal Gas and Chemical Management System:
Air Products is the leader in on-site services for our customers through our MEGASYS Gas and Chemical Management System, a strategic, on-site alliance for reducing customers' costs and increasing their productivity.
- Full-time Air Products team of knowledgeable technicians, engineers, and managers at customers' sites
- Uninterrupted supply of on-spec, ultra-pure gases and chemicals at the point of use without requiring customers to worry about daily ordering and maintenance
- Lower customer operating costs through improved uptime and added-value services
Additional services include a full line of standard and customized technical services for the semiconductor industry.
- Analytical Technical Services Group
- commissions newly installed UHP backpad and in-fab gas distribution systems
- performs APIMS analysis at the backpad and in the fabrication facility
- analyzes for particle impurities in all bulk gases
- Customer Applications Group
- works closely with IC and OEM manufacturers on process effluent characterization
- actively involved with process optimization of PFC chamber cleans, focusing on NF3 and C2F6
- works closely with OEM suppliers to determine the relationship of gas purity and process tool performance
- Analytical Technology Group
- develops methods to analyze gaseous impurities in specialty gases in the lab or at the customer's site
- Semiconductor Processing Applications Group
- develops products, processes, and applications for use in manufacturing integrated circuits
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