Product Description

Trans 1,2 Dichloroethylene (Trans-LC) is an ozone-safe liquid chlorine source for use in silicon oxidation and tube cleaning.  It features a low toxic hazard rating and is not restricted as an ozone depleting chemical. 

Air Products/Schumacher developed and patented Trans-LC through a two year collaborative effort with key customers in the merchant semiconductor manufacturing industry, and through that effort learned the lessons of Trans-LC processing, packaging, and purification.

• Trans-LC is the TCA replacement recommended by Sematech. 
• Split-lot tests by Intel, National, and Phillips show Trans-LC to be equal or superior to TCA.

Schumacher products have been delivered via bubbling for decades: Air Products technologists can consult as needed on the delivery and use of Trans-LC
Bulk equipment offerings have been developed.  These offerings will be utilized to lower the Trans-LC cost of ownership for our customers.

• Trans-LC is the preferred insitu HCl source.
  • Alternatives are TCA, HCl or no chlorine source
  • Environmentally friendly alternative to TCA.
• Trans-LC is being used in applications down to 20A.
  • High K gate dielectrics (i.e. Hf oxide from HfCl4) being studied to replace oxide
• Market leaders are continuing to come online using Trans-LC
  • Large scale manufacturing interested in bulk refill.
  • Used in memory and logic devices
• Most significant product related challenges for Air Products\
  • Switch large volume customers to the new CG Teflon lined Chem Guard which utilizes a 20L container

Application

Oxidation Process/Tube cleaning

• Oxidation Process, combining O2 and H2 to form the gate oxide layer 
• Trans LC is a non-ozone depleting liquid solvent which is delivered in a vapor form into the furnace tube
  • By using N2, (sometimes Argon) as a carrier gas, N2 is bubbled thru the liquid packaged in a quartz container and picks up the vapor carrying it to the furnace tube
• Schumacher Trans LC reacts with O2 inside the furnace to form HCl.
  • mobile ion removal
  • metallic contamination removal
• Trans LC quartz container is located in the furnace tool’s source cabinet and connected to the gas jungle
  All chemical vapor from the output of the bubbler flows through Teflon and quartz (no Stainless Steel).

Trans-LC Package

• Trans LC is packaged in 2 types  of quartz containers
  • Reusable quartz containers or Bubbler
  • Bulk reservoir which fills a 1500cc host bubbler.
• Reusable quartz bubbler comes in 4 sizes;
  • 500cc
  • 1000cc
  • 1500cc
  • 20L bulk
• Bubbler features
  • Inlet and outlet valves are “keyed” to prevent mis-connection
    • 1/4” manual inlet valve
    • 3/8” manual outlet valve
  • Thermal well for Temp Probe
  • Curved design for added strength when pressurizing
  • PVC plastic coating to prevent liquid from splashing should bubbler be dropped and broke

Production Process