MIDLAND, MI. — July 8, 2002 — Dow Corning Corporation today announced the introduction of three new chemical vapor deposition (CVD) precursors—Z4MS™, ZTOMCATS™ and Z2DM™. Dow Corning's introduction of these products demonstrates a continued effort to innovate solutions that meet the changing demands of the dielectric market, and enables a wide range of choices to the semiconductor industry.
The new products—Dow Corning® Z2DM CVD Precursor (dimethyldimethoxysilane), Dow Corning® Z4MS CVD Precursor (tetramethylsilane), and Dow Corning® ZTOMCATS CVD Precursor (tetramethylcyclotetrasiloxane)—are multifunctional silicon source liquids specifically designed for advanced PECVD processes used to deposit thin film dielectrics including, passivation, etch stop, hard mask and copper diffusion barrier films. These high performance liquid precursors are compatible with copper dual damascene and aluminum processes.
Currently available, the products offer the same low cost of ownership, quality and reliable supply as the company's award-winning Dow Corning® Z3MS™ CVD Precursor, a versatile, high-performance film designed for a variety of applications. The new precursors are colorless, noncorrosive, nonpyrophoric, organosilicon liquids that meet the highest purity requirements of the semiconductor industry.
Additionally, Dow Corning has the manufacturing capacity and site redundancy required to meet any and all of its customers' needs across the globe. The company's global presence enables it to provide customers with local technical service and a stable supply of quality product.
Schumacher—a business unit of Air Products and Chemicals, Inc. and a leading worldwide supplier of ultra-high purity chemicals and delivery equipment to the global electronics industry—has agreed to be the master distributor of the new products. This agreement represents a strong alliance between two of the largest players in the liquid CVD precursor market and will enable the companies to serve any customer in any location in the world. Schumacher will package Dow Corning's precursors and will sell to end user customers and distributors through its worldwide distribution network.
About Dow Corning Electronics
Dow Corning Electronics—a globally integrated provider of materials, application technology and services—is focused on providing innovative technology for all segments of the electronics industry. Dow Corning Corp. (http://www.dowcorning.com/electronics) offers a wide range of silicon-based products and services to help customers invent the future. The company is equally owned by The Dow Chemical Co. (DOW) and Corning Inc. (GLW).
About Air Products and Chemicals, Inc. (NYSE:APD)
Air Products and Chemicals, Inc. (www.airproducts.com) is the world's only combined gases and chemicals company. Founded more than 60 years ago, the business has annual revenues of $5.7 billion and operations in 30 countries. Air Products is a market leader in the global electronics and chemical processing industries, and a longstanding innovator in many industrial markets, including coatings, adhesives and polyurethanes. The company distinguishes itself through its 18,000 employees around the world, who build lasting relationships with their customers and communities based on understanding, integrity and passion. Air Products' Schumacher unit provides process chemicals for CVD dielectrics and metals, oxide passivation, diffusion and ion implant applications, as well as a full line of temperature controllers, vapor delivery systems and bulk refill systems. With headquarters in Carlsbad, California, Schumacher's business has global reach, with manufacturing and customer support centers in the U.S., Europe, and the Pacific Rim.
For editorial assistance, contact:
Phone: Tim Adams (989) 496-8867
E-mail: tim.adams@dowcorning.com
For product information, contact:
Dow Corning Corporation
Customer Service Dept.
P.O. Box 0994
Midland, Mich. 48686-0994
Phone: (989) 496-6000
Toll-free: (800) 346-9882
FAX: (989) 496-4586
Web site: http://www.lowkleader.com
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