| Electronics and Photovoltaics |
| Products |
End-Use Industries |
Direct Benefits |
Indirect Benefits |
| GASGUARD® Bulk Specialty Gas Supply Systems |
- Integrated circuit
- TFT/LCD screens
- LEDs
|
Equipment supports customer use of bulk specialty material quantities
Reduced frequency of container change-outs; reduces the amount of process gas used in purge during container change so that more is used in the process |
Our bulk specialty gases and equipment enable production of semiconductors, liquid crystal displays and other devices that consume less energy |
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Less human interaction; decreased leak potential
Less waste; more of the gas is used with a lower potential impact on product quality
Supports larger container packages required for the manufacture of solar cells |
Our bulk specialty gases and equipment enable production of solar cells that consume less energy and provide environmental benefits |
| Nitrogen Trifluoride (NF3) |
- Electronics
- Photovoltaics
|
As a replacement for other chamber cleaning gases, has enabled a substantial reduction in emissions of high global warming potential gases to the atmosphere |
Mostly destroyed in use and further controlled with state-of-the-art control technology and abatement equipment |
| Trans-LC™ |
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Ozone-safe liquid chlorine source for silicon oxidation and tube cleaning |
Addresses the requirements of the Montreal Protocol |
| XeCovery |
- Lighting
– Semiconductors
– Healthcare
– Microelectronics
- Lasers
- Aerospace
- Materials processing
|
Xenon recovery technology enables gas recovery and reuse, saving valuable time and money in the process; requires less electricity to extract the rare gas from the atmosphere |
Reduction in overall power consumption, thereby reducing emissions |
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