December 2005 | Volume 3

Improve Film Properties with Megabit™ III Phosphine

Air Products' commitment to providing solutions to the electronics industry continues with the introduction of Megabit III Phosphine.

Increase Mobility and Reduce Background Doping with Megabit III Phosphine (PH3)

Air Products has recently launched our new Megabit III grade of Phosphine. Megabit III Phosphine was developed in response to market requests for a product which yielded improved device performance at a competitive price. The table below shows that the Megabit III Phosphine delivers on improvements in background doping and mobility.

Customer Benefits

* Better film performance: Higher mobility and lower background doping

* Improved product consistency: From cylinder to cylinder as well as from full to empty cylinder

* Better specification: Lower oxygen and metal impurities -- Resulting in customer being able to use more of the cylinder contents.

Megabit III Phosphine has fewer impurities than other grades of Phosphine due to an improved purification process, better analytical methods and cylinder conditioning. This translates into a more consistent product from cylinder to cylinder AND within the same cylinder (from full to empty). The results have been tested and confirmed by customers.