February 2006 | Volume 4

ACT® AS Series -

Etch residue removers and photoresist strippers from a name you can trust

Low Cost & Environmentally Friendly

In today’s highly competitive environment where raw material prices and transportation costs continue to rise, it’s nice to know you can rely on Air Products’ ACT® product line to deliver new cost-effective solutions. With its ACT product line, Air Products has developed a versatile family of products that provide dependable performance and reliability.

Delivering solutions is what we do...

Air Products is pleased to announce the ACT® AS Series of products. The ACT AS Series is your solution for low cost, environmentally friendly, versatile etch residue removers and photoresist strippers. The product family offers a cost-effective solution with cleaning capabilities comparable to Hydroxylamine-based strippers. The unique solvent platform reduces environmental impact. Products within the AS Series family offer the flexibility for use with or without an intermediate rinse. ACT AS Series applications include etch residue, ash residue and positive photoresist removal on both multi-wafer batch immersion and multi-wafer batch spray tools. Primarily for use with aluminum technologies, ACT AS-70, ACT AS-75 and ACT AS-85 are also compatible with copper technologies.

®Registered trademark of Air Products and Chemicals, Inc.
¹Black Diamond is a trademark of Applied Materials, Inc.
²CORAL is a registered trademark of Novellus Systems, Inc.
*=not compatible