Issue 9, August 2007
Post-CMP Cleans
Air Products has developed proprietary Chemical Mechanical Planarization (CMP) cleaners, surface conditioners, and pad cleaners to meet the increasing demands created by advanced technology integration roadmaps. Through our relationships with industry leading OEMs and advanced device manufacturers, Air Products has leveraged R&D and material science capabilities to understand customer challenges and provide solutions for technologies at 65nm and beyond. Combine this with our state-of-the-art blending, analytical, and manufacturing facilities, and it becomes clear why Air Products is the worldwide leader in the supply of advanced post-CMP cleaning materials to the semiconductor industry.
Our versatile CoppeReady™ product line includes a series of application-specific products that are designed to reduce the customer's overall cost of ownership while providing leading edge cleaning performance. CoppeReady CP72B is an acidic clean while CoppeReady CP74 is an alkaline clean.
Post-CMP cleaning products are high performance materials specifically designed to remove trace metal and particle contaminants deposited by the CMP process without etching or corroding the metal surfaces or the dielectric substrates. Post-CMP cleans are specifically designed to clean wafers constructed with current and next generation materials.
Our Air Products CoppeReady cleaning products feature:
- Low cost of ownership
- No water-mark formation
- Excellent general and galvanic corrosion protection for copper lines
- Complete removal of organic inhibitor residues
- Avoidance of heavy copper oxide formation
- Excellent particle removal efficiency
- Compatibility with low-K materials
- Excellent removal of trace metals from the wafer surface
- No Cu dendrite/bridge formation
- Improvements in e-test performance
- No microbial growth during storage/transportation
As a leader in the global electronics industry, Air Products’ customers look to us for purity, performance and cost-effectiveness. These factors are what separate our post-CMP cleaning products from the rest of the pack.
For additional information on our post-CMP product lines, please contact:
Gautam Banerjee, Business Manager
banerjg@airproducts.com
Paul Nemesh, New Product Development Manager
nemeshpg@airproducts.com
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