Issue 14
February 2009

GASGUARD® Direct Blender
On-Site Dynamic Gas Blender Supply System

The PV, IC and flat panel industries all require large volumes of gas dopants for the epitaxial layer.  Usually the dopants are mixed at ratios between .5% to 5% in Hydrogen (H2).  As production ramps and gas flow rates increase, traditional gas supplies using cylinders or even a supply of “Y” sized (40.5 M3) cylinders of the gas mix are a challenge due to cylinder handling, space requirements and inventory costs. 

In an attempt to reduce these costs for our customers, Air Products has leveraged its own mixed gas production experience to create an on-site gas blender designed to dynamically blend the mix at your site. 

Pure dopant is contained within the blender module.  The pure dopant cylinder feeds gas into the mixing panel which then blends the dopant gas with on-site hydrogen to the pre-defined mix ratios.  The integral analytical system validates and dynamically adjusts the blend accuracy, real time.  The mixed gases are then stored in the surge tank or day tank located nearby.  If the delivery gases begin to go off-spec, the integral analytical system adjusts the mix to maintain blend tolerance. 

Understanding the Blending Process
The schematic below explains the blending process.  Please contact Air Products today for help in properly scoping the blender for your application and budget.

illustration.jpg

Experience
An advantage of this integrated all-in-one system over an alternative separate blender and analytical system is that both the mixing process and the continual analysis controls the blend.  This also makes the system more cost-effective since it is driven by one controller.  The system is a smaller scale replica of Air Products’ own dynamic blend production plant located in Choenan, Korea.  This offering is designed with real world, production experience. 

Total Solutions
To improve operating costs for our customers, Air Products pioneered the use of BSGS to supply larger volumes of specialty gases, instead of the traditional cylinder gas cabinets.  Air Products latest approach to improve the costs position for our customers is to again use its specialty gas plant experience to move larger volumes of specialty gases with onsite dynamic blending.  The blender can take advantage of the fact that on-site H2 is already available to make the mix and the only other ingredients are the pure dopant, the dynamic blending equipment, and the expertise to operate and maintain the system to run reliably.  This total solutions approach is what made Air Products the global leader in BSGS supply.  By taking the approach to own, operate and maintain the blender system, Air Products can provide the same guarantee of quality, safety and reliability that BSGS is also known for.  So the choice is simple: handle too many cylinders of an expensive mixed gas that has limited shelf life, or get the same product made fresh as needed, where needed.

For additional information on our GASGUARD Direct Blender, please listen to our podcast featuring Bob Ford, or contact David Eshelman, product manager. 

  QUESTIONS?

David Eshelman
Product Manager
(760) 929-6250

 
  LINKS

EES Website

eLearning Center

Solutions Update Archive

Air Products Electronics

 

GASGUARD® Direct Blender Podcast

Bob Ford describes the equipment that provides cost-effective, on-site blending for dopant mixes. (08:19)

> To read a transcript of
this podcast,
click here.

> play audio

> download

Air Products and Chemicals, Inc., 2009
7201 Hamilton Blvd, Allentown, PA 18195