Air Products acquired the assets of PolyFlow Engineering LLC on June 10, 2011. PolyFlow manufactures a line of equipment focused on advanced chemical delivery and precision cleaning for leading semiconductor and photovoltaics manufacturers.
The PolyFlow equipment products are an excellent complement to our Air Products delivery equipment offering. The PolyFlow range of products significantly broadens our extensive GASGUARD® and ChemGuard® Gas and Chemical Delivery Systems portfolio to now include equipment offerings for, Wafer Carrier Cleaning, Parts Cleaning, Quartz Etching, and Cleaning and Advanced Chemical Delivery.
Technical Service for the PolyFlow equipment offering will continue to be handled through the PolyFlow New Mexico facility. Existing PolyFlow customers will experience no disruption of or changes to the excellent service they have come to expect from PolyFlow. Please continue to use your existing PolyFlow contacts for your current equipment needs.
The Air Products PolyFlow offering includes:
- FlowMaster CMP Slurry Delivery System
- FlowMaster Chemical Delivery System
- MS277-II Cleaning System (FOUP/FOSB cleaner)
- FX-60 Cleaning System (300mm FOUP/FOSB cleaner)
- HTC-8030 Cleaning System
- Ultra Cleaning System
- Typhoon Quartzware Cleaner
- Omni Quartzware Cleaner
View the Air Products PolyFlow Offering