| In the electronics industry, helium enhances heat transfer and provides the stable inert atmosphere necessary for increased productivity in semiconductor manufacturing. Helium is used as a purge and carrier gas in IC fabs and as a push gas for tetraethylorthosilicate (TEOS). Air Products can provide a reliable supply of high-purity electronics—grade helium and other gases-along with the expertise to optimize your process.
Our experts can help you select the right helium grade for your application.
| Silicon semiconductors |
| Wafer stripping |
X
|
X
|
X
|
| Etching |
X
|
X
|
X
|
| Front end of the line |
X
|
X
|
X
|
| Processes |
|
|
|
| Doping |
X
|
X
|
X
|
| Lithography |
X
|
X
|
X
|
| Compound semicondustors |
| Arsenide processes |
X
|
X
|
X
|
| Nitride processes |
X
|
X
|
X
|
| Phosphide processes |
X
|
X
|
X
|
| Fiber Optics |
| Perform deposition |
X
|
X
|
X
|
| Consolidation |
X
|
X
|
X
|
| Holding ovens |
X
|
X
|
X
|
| Fiber draw |
X
|
X
|
X
|
| Wafer manufacturing |
X
|
X
|
X
|
| Slicing |
X
|
X
|
X
|
| Polishing |
|
|
|
| Cleaning |
X
|
X
|
X
|
| Epitaxial doping/deposition |
X
|
X
|
X
|
| Device packaging |
|
Testing
|
X
|
X
|
X
|
As the largest international supplier of helium, Air Products provides:
- Access to greatest production capacity of any helium supplier in the world
- Application experience in all facets of the semiconductor industry
- A range of helium delivery options to meet your needs
Helium Recovery Questionnaire  |
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