| SMIF, Box, Wafer Carriers & Reticle Pod Cleaners |
| ULTRA™ Cleaning Systems |
- Industry’s only carrier cleaner with integrated UltraSonic (U/S) capabilities
- Flexible design configuration allows user defined processes including U/S,
high pressure DI water, surfactant, high & low pressure CDA drying - Single unit cleans all carrier types up to 300mm
- In-line processing allows for through-wall mounting
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Request Data Sheet |
| HTC 8030™ |
- Single unit cleans all carrier types up to 450mm
- Simple and effective operation
- Spray process yields consistent results and avoids contamination carry over
- Industry’s lowest cost and smallest footprint carrier cleaner
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Request Data Sheet |
| Diffusion Quartzware Cleaning Equipment |
| Typhoon™ |
- Dual oversize carousels are capable of handling a wide range of parts
- A tube or liner plus various items on each side
- Each side operates with simultaneous and independent recipes with isolated process systems
- Four tanks included to provide a recirculating and a single use polish acid for each side
- 200mm and 300mm configurations available
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Request Data Sheet |
| OMNI 300™ |
- Vertical furnace tubes up to 16 ¾" in diameter can be cleaned
- Oversize carousel is equipped with specialized fixturing to handle boats, T/Cs and pedestals
- Meets stringent H6 building code by storing less than 25 gallons of acid for a dual chemical cycle
- Available with fire safe construction featuring Corzan 4910 exterior. 200mm and 300mm configurations available
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Request Data Sheet |
| Typhoon SC™ |
- Now an even more affordable all spray system is available
- Huge savings over immersion cleaning
- Greatly reduces acids on board
- Small footprint, fast cycle
Proven Typhoon cleaning process - Advanced safety
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Request Data Sheet |
| Quartz Etchers/Optical Fiber |
| Omni Quartz Etcher |
- Automatic cycles/HMI Control system
- Twin chambers (Rods or tubes/combination)
- Up to 12 rods or 8 tubes per cycle
- Tube ID up to 63 mm (up to 4000 mm long)
- Tube OD up to 180 mm (up to 4000 mm long)
- Rod diameters up to 120 mm (up to 4000 mm long)
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Request Data Sheet |
| Solar and MEMS Benches |
| Typhoon SC™ |
- Now an even more affordable all spray system is available
- Huge savings over immersion cleaning
- Greatly reduces acids on board
- Small footprint. Fast cycle
- Proven Typhoon cleaning process
- Advanced safety
|
Request Data Sheet |
| ULTRA™ Cleaning Systems |
- Industry’s only carrier cleaner with integrated UltraSonic (U/S) capabilities
- Flexible design configuration allows user defined processes including U/S, high pressure DI water, surfactant, high & low pressure CDA drying
- Single unit cleans all carrier types up to 300mm
- In-line processing allows for through-wall mounting
|
Request Data Sheet |
| Chemical Delivery Systems |
| FlowMaster® Delivery System |
- Full on-line analytical capability
- Process redundancy for zero downtime during scheduled maintenance
- Engineered to supply the highest precision flurry mixtures
- Dynamic blending for maximum process
- Over 100 units in operation in the world's most advanced fabs
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| FlowMaster ChemBlend System |
- Automatic blending of Ultra Pure Water and multiple chemicals
- Parallel independent blending trains; each train consisting of up to 4 liquid flow controllers
- Redundant system assures a continuous operation controlled by the on-board PLC/HMI
- User defined analytical capabilities
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Request Data Sheet |
| FlowMaster Automatic Carboy |
- Precise inline blending of chemicals
- Automatic filling of carboys
- Variable carboy sizes
- Repeatability you can trust
- Real time quality monitoring
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| Chemical Delivery Station |
- Automatic switch-over enables uninterrupted chemical supply
- Drum levels are monitored and displayed as 0-100% on the control panel using redundant
drum-empty sensors - Communicates with wet process equipment for command and status signals
- Drip-less dry break connections for safe drum change-out
- Acids, bases and solvents
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Request Data Sheet |