Air Products supplies crystalline and thin film PV manufacturers with specialty chemicals for manufacturing applications. Click on the product below for more information.
Boron TriBromide (BBr3)
EXTREMA™ Boron Tribromide (BBr3) is a liquid boron source used for creating P-type regions in silicon substrates, for use in semiconductor and photovoltaic process applications
Phosphorus Oxychloride (POCl3)
Phosphorus Oxychloride (POCl3) is a liquid Phosphorus used for diffusion of N-type regions into silicon substrates, for use in semiconductor and photovoltaic process applications.
Watch our six-part video series on the safe handling of Phosphorus Oxychloride (POCl3).
Trans-LC® (Trans 1,2-Dichloroethylene)
EXTREMA® Trans 1,2-Dichloroethylene (Trans-LC®), a Schumacher® product, is an ozone-safe liquid chlorine source for use in silicon oxidation and tube cleaning. It features a low toxic hazard rating and is not restricted as an ozone depleting chemical. Trans-LC provides consistent process results and is superior in performance to corrosive HCl. The use of Trans-LC is preferred over any known chlorine sources in the low temperature range below 800oC.
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