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Photoresist Stripping

Air Products supplies specialty chemicals for use in semiconductor photoresist stripping applications. Our offering features our ACT® specialty chemical strippers.

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ACT® 114

ACT® 114 is a semi-aqueous, low-hydroxylamine content formulation designed for etch residue removal and positive resist stripping.  ACT 114 provides a lower cost of ownership and superior EH&S profile compared to traditional hydroxylamine-based strippers and has the advantage of zero etch of silicon.

ACT® 273

ACT 273 is a semi-aqueous formulated product designed for effective removal of etch residues from CoWP/Cu and porous low-k technologies.

ACT® 410

ACT 410 is a specially formulated product for stripping hard to remove positive photoresist, including UV-cured resist and organic etch residue

ACT® 412

ACT 412 is a specially formulated product for stripping hard to remove positive photoresist, including UV-cured resist and organic etch residue.

ACT® 690SX

ACT 690SX is an organic solvent-based blend that is very effective in removing severely processed photoresist films and etch residue over corrosive sensitive metals and alloys.

ACT® 915A

ACT 915A is a highly effective hydroxylamine-containing etch residue remover formulated to remove etching residues after via, poly, and aluminum metal etch process.

ACT® 927C

ACT 927C is a highly effective HA-containing etch residue remover and positive photoresist stripper.  It is extremely successful in removing refractory etch residue while protecting exposed aluminum, titanium, and tungsten.

ACT® 930

ACT® 930 is a member of the reduced-Hydroxylamine family of stripper products. It is extremely effective in removing refractory etch residue and positive photoresist while protecting exposed aluminum, titanium, and tungsten.

ACT® 935 UP

ACT® 935 UP is a highly effective Hydroxylamine-containing etch residue and positive resist stripper. This product has gained acceptance in a wide range of applications throughout the semiconductor industry.

ACT® 940

ACT 940 is a highly effective HA-containing etch residue remover and positive photoresist stripper.

ACT® 970

ACT 970, a member of the ACT family of stripper products, is extremely effective in removing refractory etch residue while protecting exposed copper.

ACT® AS-65

ACT AS-65 is a highly effective non-HA amine-based stripper with cleaning performance rivaling that of hydroxylamine(HA)-containing products.

ACT® CMIK-S

ACT<sup>®</sup> CMIK-S is a proprietary formulation specifically designed for the effective removal of positive photoresists from highly corrosion-sensitive metals and metal alloy substrates.

ACT® CMI-S

ACT CMI-S is a corrosion inhibited water-soluble solution which effectively removes hard-processed positive resist and organic etch residue from corrosion-sensitive metal alloy substrates.

ACT® EZSTRIP® 528H

ACT EZSTRIP 528H is a fluoride-containing chemistry specially formulated for effective removal of post-etch and ash residue.  Designed to be an aggressive cleaners mild process conditions.

ACT® EZSTRIP®20

ACT© EZSTRIP©20 is a highly effective non-Hydroxylamine (HA) stripper with the cleaning performance of HA-containing products. In addition, ACT EZSTRIP 20 can be used in aluminum or copper applications.

ACT® NE-111

ACT® NE-111 is a buffered, pH stable fluoride-containing stripper specifically formulated for removal of highly oxidized etch residues while reducing surface metal contamination.

ACT® NE-14

ACT NE-14 is a fluoride-containing chemistry specially formulated for removal of organic and highly oxidized etch residues and/or for controlled etching of contaminated oxide surfaces.

ACT® NE-168

ACT NE-168 is a buffered fluoride-containing stripper product engineered to meet the challenging requirements of semiconductor surface preparation technology.  The formulation removes ash and etch residue and is compatible with copper and low-k materials.

ACT® NE-89

ACT NE-89 is a fluoride-containing chemistry specifically formulated for use in etch residue removal and/or controlled etching of contaminated oxide surfaces.

ACT® NE-200

ACT® NE-200 is a fluoride-containing product especially formulated for removal of inorganic and highly oxidized etch residues and/or for controlled etching of contaminated oxide surfaces.