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Post CMP Cleaning

Air Products supplies specialty chemicals for use in semiconductor post-CMP cleaning applications. Our offering features the CoppeReady® product line, including CoppeReady® CP72B and CP98D.

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Citric Acid High-Purity Cleaning Solution

Citric Acid is a high-purity cleaning solution for use in a wide variety of semiconductor manufacturing processes, both as a stand-alone material and as an additive to other cleaning chemistries.  Air Products has a long history in supplying high purity Citric Acid. The product has been supplied to the semiconductor manufacturing industry for more than 15 years.

Citric Acid is a high-purity cleaning solution for use in a wide variety of semiconductor manufacturing processes, both as a stand-alone material and as an additive to other cleaning chemistries.  Air Products has a long history in supplying high purity Citric Acid. The product has been supplied to the semiconductor manufacturing industry for more than 15 years.

CoppeReady® BTA-02NB

CopperReady® BTA-02NB is 0.02% of Benzotriazole solution that functions as a corrosion inhibitor for CMP processes.

CopperReady® BTA-02NB is 0.02% of Benzotriazole solution that functions as a corrosion inhibitor for CMP processes.

CopperReady® BTA-1NB

CoppeReady® BTA-1NB is 1% of Benzotriazole solution that functions as a corrosion inhibitor for CMP processes.

CoppeReady® BTA-1NB is 1% of Benzotriazole solution that functions as a corrosion inhibitor for CMP processes.

CopperReady® CP72B

CoppeReady® CP72B is part of our CoppeReady series of application-specific products (cleaners, surface conditioners,and pad cleaners) that are designed to reduce the customer's overall cost of ownership while providing leading edge cleaning performance.  CoppeReady CP72B was engineered specifically to remove trace metals, organics and particle contaminants from copper, tantalum/tantalum nitride and hydrophobic low-k surfaces. 

Read more about one of our customer’s experiences with our CoppeReady® CP72B in the June 2015 SST article: “Reduced Defectivity and Cost of Ownership Copper CMP Cleans”

CoppeReady® CP72B is part of our CoppeReady series of application-specific products (cleaners, surface conditioners,and pad cleaners) that are designed to reduce the customer's overall cost of ownership while providing leading edge cleaning performance.  CoppeReady CP72B was engineered specifically to remove trace metals, organics and particle contaminants from copper, tantalum/tantalum nitride and hydrophobic low-k surfaces. 

Read more about one of our customer’s experiences with our CoppeReady® CP72B in the June 2015 SST article: “Reduced Defectivity and Cost of Ownership Copper CMP Cleans”

CopperReady® CP98-D

CoppeReady® CP98-D is part of our CoppeReady series of application-specific products (cleaners, surface conditioners and pad cleaners) that are used to reduce the customer’s overall cost of ownership while providing leading edge cleaning performance.  CoppeReady CP98-D is designed specifically for use in advanced Co, Mn and Ru barriers, but is also compatible with all standard barrier metals in use today.

CoppeReady® CP98-D is part of our CoppeReady series of application-specific products (cleaners, surface conditioners and pad cleaners) that are used to reduce the customer’s overall cost of ownership while providing leading edge cleaning performance.  CoppeReady CP98-D is designed specifically for use in advanced Co, Mn and Ru barriers, but is also compatible with all standard barrier metals in use today.

ECP Clean Cu CMP Cleaning and Pad Clean Solution

ECP Clean is a legacy cleaning chemistry for use in Cu CMP processes. It is currently used as a pad cleaner, as well as in the megasonic tank and brush boxes. Air Products has a long history in supplying ECP Clean. The product was developed more than 10 years ago, and has been manufactured in our Dallas facility since its initial introduction to the semiconductor industry.

ECP Clean is a legacy cleaning chemistry for use in Cu CMP processes. It is currently used as a pad cleaner, as well as in the megasonic tank and brush boxes. Air Products has a long history in supplying ECP Clean. The product was developed more than 10 years ago, and has been manufactured in our Dallas facility since its initial introduction to the semiconductor industry.

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