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Delivery System

Product NameDescription/BenefitsDownloads

FlowMaster® CMP Slurry Delivery System

The FlowMaster® CMP Slurry Delivery System consistently blends and delivers CMP slurry. Redundant systems and a broad range of analytical capabilities help deliver the most uniform and accurate blend consistencies to the wafer.

The FlowMaster® CMP Slurry Delivery System consistently blends and delivers CMP slurry. Redundant systems and a broad range of analytical capabilities help deliver the most uniform and accurate blend consistencies to the wafer.

FlowMaster®Chemical Delivery System

The FlowMaster® Chemical Delivery System supplies precise blending and delivery of post-CMP rinse chemical. When integrated with the slurry delivery system the entire tool suite delivers a complete CMP chemical solution.

The FlowMaster® Chemical Delivery System supplies precise blending and delivery of post-CMP rinse chemical. When integrated with the slurry delivery system the entire tool suite delivers a complete CMP chemical solution.

FX-60 Cleaning System

The FX-60 is specifically engineered for 300mm FOUPs and FOSBs. The use of a patented solution isolation technology provides superior cleaning and drying performance in a compact unit.

The FX-60 is specifically engineered for 300mm FOUPs and FOSBs. The use of a patented solution isolation technology provides superior cleaning and drying performance in a compact unit.

HTC-8030 Cleaning System

HTC is a compact and cost effective carrier cleaner.  With its single chamber configuration, spray cleaning and drying technologies, HTC is a versatile system to clean a broad range of carriers and containers from 100mm to 300mm with low cost of ownership.

HTC is a compact and cost effective carrier cleaner.  With its single chamber configuration, spray cleaning and drying technologies, HTC is a versatile system to clean a broad range of carriers and containers from 100mm to 300mm with low cost of ownership.

Omni Quartzware Cleaner

The Omni is a flexible quartzware cleaner. One of the two chambers cleans tubes and the other chamber cleans boats and peripherals. Custom fixturing provides safe etch and rinse for all parts.

The Omni is a flexible quartzware cleaner. One of the two chambers cleans tubes and the other chamber cleans boats and peripherals. Custom fixturing provides safe etch and rinse for all parts.

Typhoon Quartzware Cleaner

The Typhoon is an advanced high capacity quartzware cleaner with two identical process chambers.  Each process chamber is equipped with two chemical storage tanks that operate independently.  The Typhoon cleans one tube or multiple boats and other small parts per cycle.

The Typhoon is an advanced high capacity quartzware cleaner with two identical process chambers.  Each process chamber is equipped with two chemical storage tanks that operate independently.  The Typhoon cleans one tube or multiple boats and other small parts per cycle.

Ultra Cleaning System

The Ultra is a versatile carrier cleaner with customized cycles including: prewash, spray wash, ultrasonic wash, immersion wash, spray rinse, ultrasonic rinse, dynamic drying, and blower dry. Compatible with wafer carriers, shippers, storage boxes, pods, disk carriers, bare die trays, carrier accessories, and reticle carriers.

The Ultra is a versatile carrier cleaner with customized cycles including: prewash, spray wash, ultrasonic wash, immersion wash, spray rinse, ultrasonic rinse, dynamic drying, and blower dry. Compatible with wafer carriers, shippers, storage boxes, pods, disk carriers, bare die trays, carrier accessories, and reticle carriers.

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