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ChemGuard® 10 Series Automated Chemical Refill System

The ChemGuard 10 Series are single-tank cabinets (STLRs) designed to meet the demanding needs of today's manufacturing fabs.

The ChemGuard 10 Series are single-tank cabinets (STLRs) designed to meet the demanding needs of today's manufacturing fabs.

ChemGuard® 100-400 Automated Chemical Refill System

The ChemGuard 100, 200, 300, 325 and 400 models are dual-reservoir cabinets (DTLR) designed for 100% uptime in order to meet the demanding needs of today's manufacturing fabs.

The ChemGuard 100, 200, 300, 325 and 400 models are dual-reservoir cabinets (DTLR) designed for 100% uptime in order to meet the demanding needs of today's manufacturing fabs.

ChemGuard® 5000 Automated Chemical Refill System

The ChemGuard 5000 model is a single tank liquid refill (STLR) cabinet designed to work with onboard UHP stainless steel host ampoules to provide 100% tool uptime. Fast Ampoule Change System (FACS®)Technology has been incorporated into the CG5000 allowing a validated UHP purge of molecules that previously required solvent.

The ChemGuard 5000 model is a single tank liquid refill (STLR) cabinet designed to work with onboard UHP stainless steel host ampoules to provide 100% tool uptime. Fast Ampoule Change System (FACS®)Technology has been incorporated into the CG5000 allowing a validated UHP purge of molecules that previously required solvent.

ChemGuard® BCD 100 and 200 Models Automated Chemical Refill System

The ChemGuard BCD 100 and 200 are single-reservoir bulk cabinets designed for fabwide chemical distribution allowing 100% tool uptime. Class I, Division II complaint, the BCD is designed for difficult chemistries in difficult environments.

The ChemGuard BCD 100 and 200 are single-reservoir bulk cabinets designed for fabwide chemical distribution allowing 100% tool uptime. Class I, Division II complaint, the BCD is designed for difficult chemistries in difficult environments.

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