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Flat Panel Displays (TFT/LCD)

As the display market evolves, the need for an experienced supplier of specialty gases, bulk specialty gases, and reliable gas delivery systems becomes more important. Our portfolio of products supports modern TFT-LCD display manufacturing processes.

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Product NameDescription/BenefitsDownloads

Ammonia (NH3)

Ammonia (NH3) is a colorless, pungent, flammable gas at atmospheric pressure and temperature. We sell various grades of ammonia for the semiconductor industry; for the LED/Compound Semiconductor market, we sell both White Ammonia and Blue Ammonia, in addition to our standard Ammonia offering.

Ammonia (NH3) is a colorless, pungent, flammable gas at atmospheric pressure and temperature. We sell various grades of ammonia for the semiconductor industry; for the LED/Compound Semiconductor market, we sell both White Ammonia and Blue Ammonia, in addition to our standard Ammonia offering.

Argon

Liquid Argon (Ar) is a colorless, odorless, nonflammable, inert gas delivered in cryogenic form and can reach ppb levels when passed through a purification system. We sell argon for both the semiconductor and photovoltaics industries.

Liquid Argon (Ar) is a colorless, odorless, nonflammable, inert gas delivered in cryogenic form and can reach ppb levels when passed through a purification system. We sell argon for both the semiconductor and photovoltaics industries.

Carbon Tetrafluoride (CF4)

Carbon Tetrafluoride (CF4) is used for chamber cleaning in semiconductor applications, in MEMS etching applications, and in Flat Panel Display etching applications.

Carbon Tetrafluoride (CF4) is used for chamber cleaning in semiconductor applications, in MEMS etching applications, and in Flat Panel Display etching applications.

Diborane in Hydrogen (B2H6/H2)

Diborane in Hydrogen (B2H6/H2) is a dopant mixture, developed for the photovoltaics industry. Air Products is the leading supplier of bulk and specialty gases, including dopants and dopant mixes.

Diborane in Hydrogen (B2H6/H2) is a dopant mixture, developed for the photovoltaics industry. Air Products is the leading supplier of bulk and specialty gases, including dopants and dopant mixes.

Difluoromethane (CH2F2)

Difluoromethane (CH2F2) is an anisotropic etching gas for forming high aspect ratio features in silicon and silicon oxide.  Also known as Halocarbon 32, it is used in semiconductor, MEMS, and flat panel display applications.

Difluoromethane (CH2F2) is an anisotropic etching gas for forming high aspect ratio features in silicon and silicon oxide.  Also known as Halocarbon 32, it is used in semiconductor, MEMS, and flat panel display applications.

Hexafluoroethane (C2F6) Megaclass™ Grade

C2F6 Megaclass Grade (Hexafluoro-1,3-butadiene) is an anisotropic etching gas. Ideal for etching high aspect ratio features in silicon and silicon oxide. Material is capable of forming polymer films during etching to protect sidewall and photoresist.

C2F6 Megaclass Grade (Hexafluoro-1,3-butadiene) is an anisotropic etching gas. Ideal for etching high aspect ratio features in silicon and silicon oxide. Material is capable of forming polymer films during etching to protect sidewall and photoresist.

Hydrogen

Hydrogen (H2) is a colorless, odorless, flammable gas supplied through a range of methods, including cryogenically, in vapor form, and in liquid form. We sell hydrogen for both the semiconductor and photovoltaics industries.

Hydrogen (H2) is a colorless, odorless, flammable gas supplied through a range of methods, including cryogenically, in vapor form, and in liquid form. We sell hydrogen for both the semiconductor and photovoltaics industries.

Hydrogen Chloride (HCl)

Hydrogen Chloride (HCl) is used in various surface cleaning processes and to clean LPCVD chambers.

Hydrogen Chloride (HCl) is used in various surface cleaning processes and to clean LPCVD chambers.

Nitrogen

Nitrogen (N2) is a colorless, odorless, inert gas delivered cryogenically or produced on the customer's site.  We supply nitrogen for both the semiconductor and photovoltaics industries.

Nitrogen (N2) is a colorless, odorless, inert gas delivered cryogenically or produced on the customer's site.  We supply nitrogen for both the semiconductor and photovoltaics industries.

Nitrogen Trifluoride (NF3)

Nitrogen Trifluoride (NF3) is used in Displays/Flat Panel, Photovoltaics, Compound Semiconductor, MEMS and Silicon Semiconductor manufacturing processes.

Nitrogen Trifluoride (NF3) is used in Displays/Flat Panel, Photovoltaics, Compound Semiconductor, MEMS and Silicon Semiconductor manufacturing processes.

Nitrous Oxide (N2O)

Nitrous Oxide (N2O) is an oxidant for depositing various types of oxide films.

Nitrous Oxide (N2O) is an oxidant for depositing various types of oxide films.

Octafluorocyclobutane (C4F8)

Octafluorocyclobutane (C4F8) is an anisotropic etching gas used for etching high aspect ratio features in silicon and silicon oxide. The material is used to produce polymer films in Bosch type deep silicon etching processes.

Octafluorocyclobutane (C4F8) is an anisotropic etching gas used for etching high aspect ratio features in silicon and silicon oxide. The material is used to produce polymer films in Bosch type deep silicon etching processes.

Octafluorocyclopentene (C5F8)

C5F8 (Octafluorocyclopentene) VLSI grade (99.99%) is our highest purity grade for semiconductor, MEMS, and flat panel display applications.  Octofluorocylopentene is a toxic, non-flammable, low boiling point (81oF) coloress liquid with a slight distinctive odor.

C5F8 (Octafluorocyclopentene) VLSI grade (99.99%) is our highest purity grade for semiconductor, MEMS, and flat panel display applications.  Octofluorocylopentene is a toxic, non-flammable, low boiling point (81oF) coloress liquid with a slight distinctive odor.

Oxygen

Oxygen (O2) is a colorless, odorless, oxidizing gas delivered cryogenically or by cryogenic distillation.  We supply oxygen for both the semiconductor and photovoltaics industries.

Oxygen (O2) is a colorless, odorless, oxidizing gas delivered cryogenically or by cryogenic distillation.  We supply oxygen for both the semiconductor and photovoltaics industries.

Phosphine/Hydrogen (PH3/H2)

Phosphine in Hydrogen (PH3/H2) is a dopant mixture, developed for the photovoltaics industry. Air Products is the leading supplier of bulk and specialty gases, including dopants and dopant mixes.

Phosphine in Hydrogen (PH3/H2) is a dopant mixture, developed for the photovoltaics industry. Air Products is the leading supplier of bulk and specialty gases, including dopants and dopant mixes.

Silicon Tetrafluoride (SiF4)

Silicon Tetrafluoride (SiF4) is a source of fluorine for processes requiring controlled concentrations of fluorine present to form low-k films.

Silicon Tetrafluoride (SiF4) is a source of fluorine for processes requiring controlled concentrations of fluorine present to form low-k films.

Trifluoromethane (CHF3)

Trifluoromethane (CHF3) is an Anisotropic etching gas for forming high aspect ratio features in silicon and silicon oxide.

Trifluoromethane (CHF3) is an Anisotropic etching gas for forming high aspect ratio features in silicon and silicon oxide.

Trimethylboron in Hydrogen (TMB/H2)

Trimethylboron in Hydrogen (TMB/H2) is a dopant mixture, developed for the photovoltaics industry. Air Products is the leading supplier of bulk and specialty gases, including dopants and dopant mixes.

Trimethylboron in Hydrogen (TMB/H2) is a dopant mixture, developed for the photovoltaics industry. Air Products is the leading supplier of bulk and specialty gases, including dopants and dopant mixes.

Xenon (Xe)

Xenon (Xe) is an additive for etching processes to enhance polymer formation and etching rates.

Xenon (Xe) is an additive for etching processes to enhance polymer formation and etching rates.

Xenon Difluoride (XeF2)

Xenon Difluoride (XeF2) is a highly selective isotropic etching gas used in flat panel displays (TFT/LCD) and MEMS etching applications.

Xenon Difluoride (XeF2) is a highly selective isotropic etching gas used in flat panel displays (TFT/LCD) and MEMS etching applications.

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