Arsine (AsH3) | Air Products offers two versions of Arsine gas (AsH3). Megabit™ Grade Arsine (99.9999%) is our standard high-purity grade for optoelectrical and photovoltaic applications. Megabit™ III Grade Arsine (99.99995%) is our highest-purity grade for optoelectrical and photovoltaics applications, featuring full metals analysis. | |
Diborane in Hydrogen (B2H6/H2) | Diborane in Hydrogen (B2H6/H2) is a dopant mixture, developed for the photovoltaics industry. Air Products is the leading supplier of bulk and specialty gases, including dopants and dopant mixes. | |
Fluorine (F2) | Air Products is the only gas company that has the ability to offer high-volume manufacturing of fluorine (F2) chamber clean gas, with a proven history and extensive operating experience. | |
Germane (GeH4) | Germane (GeH4) colorless, ordorless, highly toxic and flammable gas for use in semiconductor and photovoltaic process applications. | |
Germane in Hydrogen (GeH4/H2) | Germane in Hydrogen (GeH4/H2) colorless, ordorless, highly toxic and flammable gas mixture for use in photovoltaic process applications. | |
Hydrogen Selenide (H2Se) | UHP Grade Hydrogen Selenide (H2Se), >99.99%, is our high purity offering for use in semiconductor and photovoltaic process applications. Hydrogen Selenide is a colorless, flammable, extremely toxic gas with a very unpleasant odor. | |
Methane |
Methane is the major component of natural gas, about 87% by volume. At room temperature and standard pressure, methane is a colorless, odorless gas.
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Nitrogen Trifluoride (NF3) | Nitrogen Trifluoride (NF3) is used in Displays/Flat Panel, Photovoltaics, Compound Semiconductor, MEMS and Silicon Semiconductor manufacturing processes. | |
Phosphine (PH3) |
Air Products offers Phosphine (PH3) in two grades for use in semiconductor and photovoltaic process applications: MOCVD Phosphine (>99.9998%) is our standard high-purity grade and Megabit™II Phosphine (99.9999%) is our standard purity grade. Phosphine is a highly-toxic, flammable, colorless, liquefied compressed gas.
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Phosphine in Hydrogen (PH3/H2) | Phosphine in Hydrogen (PH3/H2) is a dopant mixture, developed for the photovoltaics industry. Air Products is the leading supplier of bulk and specialty gases, including dopants and dopant mixes. | |
Silane (SiH4) | Air Products' Silane (SiH4) Megaclass Grade (>99.9999% total purity) is used in displays/flat panel, photovoltaics and silicon semiconductor process applications. Silane is a colorless, extremely reactive compressed gas. It ignites spontaneously in air. | |
Trimethylboron in Hydrogen (TMB/H2) | Trimethylboron in Hydrogen (TMB/H2) is a dopant mixture, developed for the photovoltaics industry. Air Products is the leading supplier of bulk and specialty gases, including dopants and dopant mixes. | |