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Silicon Semiconductors

Air Products offers an extensive portfolio of specialty gases, gas delivery equipment systems, and experienced professionals who can help optimize your semiconductor manufacturing process. Our long history of serving the global semiconductor industry has given us the opportunity to support our customer’s changing technologies and to continue to provide products and services that help enable efficient manufacturing processes.

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Product NameDescription/BenefitsDownloads

Ammonia (NH3)

Ammonia (NH3) is a colorless, pungent, flammable gas at atmospheric pressure and temperature. We sell various grades of ammonia for the semiconductor industry; for the LED/Compound Semiconductor market, we sell both White Ammonia and Blue Ammonia, in addition to our standard Ammonia offering.

Ammonia (NH3) is a colorless, pungent, flammable gas at atmospheric pressure and temperature. We sell various grades of ammonia for the semiconductor industry; for the LED/Compound Semiconductor market, we sell both White Ammonia and Blue Ammonia, in addition to our standard Ammonia offering.

Anhydrous Hydrogen Chloride (HCl)

Anhydrous Hydrogen Chloride (HCl) for semiconductor applications.

Anhydrous Hydrogen Chloride (HCl) for semiconductor applications.

Argon

Liquid Argon (Ar) is a colorless, odorless, nonflammable, inert gas delivered in cryogenic form and can reach ppb levels when passed through a purification system. We sell argon for both the semiconductor and photovoltaics industries.

Liquid Argon (Ar) is a colorless, odorless, nonflammable, inert gas delivered in cryogenic form and can reach ppb levels when passed through a purification system. We sell argon for both the semiconductor and photovoltaics industries.

Boron Trichloride (BCl3)

Boron Trichloride (BCl3), a high-purity grade for semiconductor applications offering full metals analysis.

Boron Trichloride (BCl3), a high-purity grade for semiconductor applications offering full metals analysis.

Carbon Dioxide

Carbon Dioxide (CO2) is a colorless, odorless, nonflammable, liquefied gas that reaches ppb levels when standard carbon dioxide is passed through a purification system. We sell carbon dioxide for the semiconductor industry.

Carbon Dioxide (CO2) is a colorless, odorless, nonflammable, liquefied gas that reaches ppb levels when standard carbon dioxide is passed through a purification system. We sell carbon dioxide for the semiconductor industry.

Carbon Tetrafluoride (CF4)

Carbon Tetrafluoride (CF4) is used for chamber cleaning in semiconductor applications, in MEMS etching applications, and in Flat Panel Display etching applications.

Carbon Tetrafluoride (CF4) is used for chamber cleaning in semiconductor applications, in MEMS etching applications, and in Flat Panel Display etching applications.

Chlorine Trifluoride (ClF3)

Chlorine Trifluoride (ClF3) is a nearly colorless gas with an irritating odor similar to chlorine or mustard with an extremely low odor threshold.  Our Semiconductor Grade ( >99.9% purity) is sold in all regions except Taiwan.  Our VLSI Grade ( >99.9% purity) is sold exclusively in Taiwan.

Chlorine Trifluoride (ClF3) is a nearly colorless gas with an irritating odor similar to chlorine or mustard with an extremely low odor threshold.  Our Semiconductor Grade ( >99.9% purity) is sold in all regions except Taiwan.  Our VLSI Grade ( >99.9% purity) is sold exclusively in Taiwan.

Difluoromethane (CH2F2)

Difluoromethane (CH2F2) is an anisotropic etching gas for forming high aspect ratio features in silicon and silicon oxide.  Also known as Halocarbon 32, it is used in semiconductor, MEMS, and flat panel display applications.

Difluoromethane (CH2F2) is an anisotropic etching gas for forming high aspect ratio features in silicon and silicon oxide.  Also known as Halocarbon 32, it is used in semiconductor, MEMS, and flat panel display applications.

Germane (GeH4)

Germane (GeH4) is a gas used for depositing the SiGe layer, which provides improved electric properties.

Germane (GeH4) is a gas used for depositing the SiGe layer, which provides improved electric properties.

Helium

Helium (He) is a colorless, odorless, inert gas delivered cryogenically that reaches ppb levels of purity when high purity helium is passed through a purification system. We supply helium for both the semiconductor and photovoltaics industries.

Helium (He) is a colorless, odorless, inert gas delivered cryogenically that reaches ppb levels of purity when high purity helium is passed through a purification system. We supply helium for both the semiconductor and photovoltaics industries.

Hexafluorobutadiene C4F6)

C4F6 (Hexafluoro-1,3-butadiene) is used for dielectric etch applications. Hexafluoro-1,3-butadiene is a toxic, colorless, odorless, flammable liquefied compressed gas.

C4F6 (Hexafluoro-1,3-butadiene) is used for dielectric etch applications. Hexafluoro-1,3-butadiene is a toxic, colorless, odorless, flammable liquefied compressed gas.

Hexafluoroethane (C2F6)

Megaclass Grade Hexafluoroethane (C2F6), also known as Halocarbon 116, is our highest purity offering for semiconductor and MEMS etching applications and MEMS chamber cleaning applications.  Halocarbon 116 is a colorless, odorless, liquefied gas.

Megaclass Grade Hexafluoroethane (C2F6), also known as Halocarbon 116, is our highest purity offering for semiconductor and MEMS etching applications and MEMS chamber cleaning applications.  Halocarbon 116 is a colorless, odorless, liquefied gas.

Hydrogen

Hydrogen (H2) is a colorless, odorless, flammable gas supplied through a range of methods, including cryogenically, in vapor form, and in liquid form. We sell hydrogen for both the semiconductor and photovoltaics industries.

Hydrogen (H2) is a colorless, odorless, flammable gas supplied through a range of methods, including cryogenically, in vapor form, and in liquid form. We sell hydrogen for both the semiconductor and photovoltaics industries.

Hydrogen Chloride (HCl)

Hydrogen Chloride (HCl) is used in various surface cleaning processes and to clean LPCVD chambers.

Hydrogen Chloride (HCl) is used in various surface cleaning processes and to clean LPCVD chambers.

Nitrogen

Nitrogen (N2) is a colorless, odorless, inert gas delivered cryogenically or produced on the customer's site.  We supply nitrogen for both the semiconductor and photovoltaics industries.

Nitrogen (N2) is a colorless, odorless, inert gas delivered cryogenically or produced on the customer's site.  We supply nitrogen for both the semiconductor and photovoltaics industries.

Nitrogen Trifluoride (NF3)

Nitrogen Trifluoride (NF3) is used in Displays/Flat Panel, Photovoltaics, Compound Semiconductor, MEMS and Silicon Semiconductor manufacturing processes.

Nitrogen Trifluoride (NF3) is used in Displays/Flat Panel, Photovoltaics, Compound Semiconductor, MEMS and Silicon Semiconductor manufacturing processes.

Octafluorocyclopentene (C5F8)

C5F8 (Octafluorocyclopentene) VLSI grade (99.99%) is our highest purity grade for semiconductor, MEMS, and flat panel display applications.  Octofluorocylopentene is a toxic, non-flammable, low boiling point (81oF) coloress liquid with a slight distinctive odor.

C5F8 (Octafluorocyclopentene) VLSI grade (99.99%) is our highest purity grade for semiconductor, MEMS, and flat panel display applications.  Octofluorocylopentene is a toxic, non-flammable, low boiling point (81oF) coloress liquid with a slight distinctive odor.

Octofluoropropane (C3F8)

Octafluoropropane, Megaclass® Grade, is our standard high purity grade. Octofluropropane is a colorless, nonflammable, liquefied gas with a detectable odor.

Octafluoropropane, Megaclass® Grade, is our standard high purity grade. Octofluropropane is a colorless, nonflammable, liquefied gas with a detectable odor.

Oxygen

Oxygen (O2) is a colorless, odorless, oxidizing gas delivered cryogenically or by cryogenic distillation.  We supply oxygen for both the semiconductor and photovoltaics industries.

Oxygen (O2) is a colorless, odorless, oxidizing gas delivered cryogenically or by cryogenic distillation.  We supply oxygen for both the semiconductor and photovoltaics industries.

Perfluorocyclobutane (C4F8)

Perfluorocyclobutane (C4F8) for semiconductor applications.  Perfluorocyclobutane (also known as Octafluorocyclobutane) is a colorless, odorless, non-flammable liquefied gas.

Perfluorocyclobutane (C4F8) for semiconductor applications.  Perfluorocyclobutane (also known as Octafluorocyclobutane) is a colorless, odorless, non-flammable liquefied gas.

Phosphine (PH3)

Air Products offers Phosphine (PH3) in two grades for use in semiconductor and photovoltaic process applications: MOCVD Phosphine (>99.9998%) is our standard high-purity grade and Megabit™II Phosphine (99.9999%) is our standard purity grade.  Phosphine is a highly-toxic, flammable, colorless, liquefied compressed gas.

 

Air Products offers Phosphine (PH3) in two grades for use in semiconductor and photovoltaic process applications: MOCVD Phosphine (>99.9998%) is our standard high-purity grade and Megabit™II Phosphine (99.9999%) is our standard purity grade.  Phosphine is a highly-toxic, flammable, colorless, liquefied compressed gas.

 

Propylene (C3H6)

Propylene (C3H6) is a gas used for building up the Amorphous Carbon Layer (ACL), which works as a hardmask to support photoresist in the etching process.

Propylene (C3H6) is a gas used for building up the Amorphous Carbon Layer (ACL), which works as a hardmask to support photoresist in the etching process.

Silicon Tetrafluoride (SiF4)

Silicon Tetrafluoride (SiF4) is a source of fluorine for processes requiring controlled concentrations of fluorine present to form low-k films.

Silicon Tetrafluoride (SiF4) is a source of fluorine for processes requiring controlled concentrations of fluorine present to form low-k films.

Trichlorosilane (TCS)

Trichlorosilane (TCS), Megabit® Grade, is our standard high purity grade.  Trichlorosilane is used in silicon semiconductor thin film deposition applications.

Trichlorosilane (TCS), Megabit® Grade, is our standard high purity grade.  Trichlorosilane is used in silicon semiconductor thin film deposition applications.

Trifluoromethane (CHF3)

Trifluoromethane (CHF3) is an Anisotropic etching gas for forming high aspect ratio features in silicon and silicon oxide.

Trifluoromethane (CHF3) is an Anisotropic etching gas for forming high aspect ratio features in silicon and silicon oxide.

Tungsten Hexafluoride (WF6)

Tungsten Hexafluoride (WF6), Megaclass grade (99.9995%), is our highest purity grade for silicon semiconductor metallization process applications, offering full metals analysis.  Tungsten Hexafluoride is a toxic, corrosive, odorless, liquefied gas.

Tungsten Hexafluoride (WF6), Megaclass grade (99.9995%), is our highest purity grade for silicon semiconductor metallization process applications, offering full metals analysis.  Tungsten Hexafluoride is a toxic, corrosive, odorless, liquefied gas.

XeCovery® Xenon Recovery System

XeCovery is Air Products' on-site service that provides a lower cost-of-ownership for customers using xenon within their manufacturing processes.

XeCovery is Air Products' on-site service that provides a lower cost-of-ownership for customers using xenon within their manufacturing processes.

Xenon (Xe)

Xenon (Xe) is an additive for etching processes to enhance polymer formation and etching rates.

Xenon (Xe) is an additive for etching processes to enhance polymer formation and etching rates.

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