Anhydrous Hydrogen Chloride (HCl) | Anhydrous Hydrogen Chloride (HCl) for semiconductor applications.
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Boron Trichloride (BCl3) | Boron Trichloride (BCl3), a high-purity grade for semiconductor applications offering full metals analysis.
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Carbon Tetrachloride (CF4) |
Carbon Tetrachloride (99.997%) is an alternate to our high purity grade for semiconductor applications. Carbon Tetrachloride is a colorless, odorless, non-flammable, inert, liquefied gas.
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Carbon Tetrafluoride (CF4) | Carbon Tetrafluoride (CF4) for chamber cleaning in semiconductor applications
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Chlorine Trifluoride (ClF3) | Chlorine Trifluoride (ClF3) is a nearly colorless gas with an irritating odor similar to chlorine or mustard with an extremely low odor threshold. Our Semiconductor Grade ( >99.9% purity) is sold in all regions except Taiwan. Our VLSI Grade ( >99.9% purity) is sold exclusively in Taiwan. | |
Difluoromethane (CH2F2) | Difluoromethane (CH2F2) is an anisotropic etching gas for forming high aspect ratio features in silicon and silicon oxide. Also known as Halocarbon 32, it is used in semiconductor, MEMS, and flat panel display applications. | |
Germane (GeH4) | Germane (GeH4) colorless, ordorless, highly toxic and flammable gas for use in semiconductor and photovoltaic process applications. | |
Hexafluorobutadiene C4F6) |
C4F6 (Hexafluoro-1,3-butadiene) is used for dielectric etch applications. Hexafluoro-1,3-butadiene is a toxic, colorless, odorless, flammable liquefied compressed gas.
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Hexafluoroethane (C2F6) | Megaclass Grade Hexafluoroethane (C2F6), also known as Halocarbon 116, is our highest purity offering for semiconductor and MEMS etching applications and MEMS chamber cleaning applications. Halocarbon 116 is a colorless, odorless, liquefied gas. | |
Nitrogen Trifluoride (NF3) | Nitrogen Trifluoride (NF3) is used in Displays/Flat Panel, Photovoltaics, Compound Semiconductor, MEMS and Silicon Semiconductor manufacturing processes. | |
Octafluorocyclopentene (C5F8) | C5F8 (Octafluorocyclopentene) VLSI grade (99.99%) is our highest purity grade for semiconductor, MEMS, and flat panel display applications. Octofluorocylopentene is a toxic, non-flammable, low boiling point (81oF) coloress liquid with a slight distinctive odor. | |
Perfluorocyclobutane (C4F8) | Perfluorocyclobutane (C4F8) for semiconductor applications. Perfluorocyclobutane (also known as Octafluorocyclobutane) is a colorless, odorless, non-flammable liquefied gas. | |
Phosphine (PH3) |
Air Products offers Phosphine (PH3) in two grades for use in semiconductor and photovoltaic process applications: MOCVD Phosphine (>99.9998%) is our standard high-purity grade and Megabit™II Phosphine (99.9999%) is our standard purity grade. Phosphine is a highly-toxic, flammable, colorless, liquefied compressed gas.
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Propylene (C3H6) | Propylene (C3H6), a flammable, colorless, non-toxic gas used in silicon semiconductor thin film deposition applications. | |
Silane (SiH4) | Air Products' Silane (SiH4) Megaclass Grade (>99.9999% total purity) is used in displays/flat panel, photovoltaics and silicon semiconductor process applications. Silane is a colorless, extremely reactive compressed gas. It ignites spontaneously in air. | |
Silicon Tetrafluoride (SiF4) | Air Products' Silicon Tetrafluoride (SiF4) VLSI Grade (>99.998%) is our highest purity grade for electronic applications. Silicon Tetrafluoride is a source of fluorine for processes requiring controlled concentrations of fluorine present for film Thin Film Deposition or etching defects during film Thin Film Deposition. | |
Trifluoromethane (CHF3) | Trifluoromethane (CHF3) is an Anisotropic etching gas for forming high aspect ratio features in silicon and silicon oxide. | |
Trimethylsilane (3MS) |
Trimethylsilane (3MS™) CVD Precursor is a silicon source specialty gas engineered for PECVD processes.
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Tungsten Hexafluoride (WF6) | Tungsten Hexafluoride (WF6), Megaclass grade (99.9995%), is our highest purity grade for silicon semiconductor metallization process applications, offering full metals analysis. Tungsten Hexafluoride is a toxic, corrosive, odorless, liquefied gas. | |
XeCovery® Xenon Recovery System |
XeCovery is Air Products' on-site service that provides a lower cost-of-ownership for customers using xenon within their manufacturing processes.
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