Air Products is recognized globally for our extensive portfolio of specialty chemicals, used in semiconductor deposition and stripping applications. Our portfolio includes the Schumacher® line of current and next generation Low-k materials and advanced High-k precursors.
Additionally, our portfolio of ACT® materials comprises the ultimate technology in strippers and residue removers for single wafer, batch spray, and wet bench tools for Cu/Low-k, non-volatile memory, photoresist stripping, and etch residue removal processes.
Air Products knows semiconductor fabs inside and out – we’ve been a key supplier to this industry for more than 30 years. Through that experience, we understand the challenges facing fabs today and know that many of those challenges are in the details.