Dr. Bob Ridgeway, group leader for PECVD and FCVD Applications at Versum Materials, will deliver a presentation at the IC Forum of SEMICON Taiwan on September 9, 2016, entitled, “Development of a Porous low-k Precursor to Provide Enhanced Mechanical Properties without Sacrificing Carbon Content.”
Scheduled for 3:10 p.m., in Room 401 of Hall 1, Ridgeway’s presentation will be based on a recent detailed investigation which he co-authored with Versum colleagues William R. Entley, Jennifer L. Achtyl, Raymond N. Vrtis and Jianheng Li. His talk will focus on a novel silicon-containing precursor that balances the higher mechanical strength associated with low-carbon films with the improved resistance to plasma induced damage (PID) typically associated with high-carbon films. By leveraging our long-standing expertise, a unique offering has been developed that continues to strengthen our marketing leading position in the low-k space. Through plasma enhanced chemical vapor deposition and UV curing, the deposited films have improved mechanical properties by incorporation of carbon bridging in the porous low-k network with reduced PID compared to films deposited only for mechanical strength enhancement.
The presentation will also provide empirical modeling results allowing the selection of operating conditions using the novel precursor to achieve specific films property targets related to dielectric constant, elastic modulus, hardness and PID. All work described in the paper was performed on an industry-relevant platform using 300mm wafers.
The presentation will be part of Versum’s presence at SEMICON Taiwan show, where the company will publicly introduce its new identity ahead of the spin-off of Versum Materials from Air Products planned for October 2016. Versum will showcase, in Booth #138 - 4th Floor, the innovative products and services that make the company one of the semiconductor industry’s largest and most respected suppliers.
Information on the products and services displayed at the show will be available at www.airproducts.com/semicon.